Aplikace digitální holografické mikroskopie s proměnný stupněm koherence osvětlení v profilometrii povrchů.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F08%3APU78130" target="_blank" >RIV/00216305:26210/08:PU78130 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Surface observation and measurement by means of digital holographic microscope with arbitrary degree of coherence

Popis výsledku v původním jazyce

The application of digital holographic microscope (DHM) imaging and inspection of fine surface structures, dimensions of which are in the range from units of nanometers up to units of micrometers in optical axis direction, is described in this paper. Accurate results of surface structures measurement, in the case the surface profile height is of three orders range, is achieved by simultaneous processing of optically sectioned image intensity and image phase. Surface profile height is roughly specified by the image intensity and the precise height information is acquired from the image phase. Full width at half maximum of the axial intensity response is adjusted properly for particular specimen by the modification of the spectral function of illumination and by resizing of the incoherent illumination source. It means the intervention into spatial and temporal coherence of the illumination. The content of this paper is the description of imaging characteristics of the DHM for individual

Název v anglickém jazyce

Surface observation and measurement by means of digital holographic microscope with arbitrary degree of coherence

Popis výsledku anglicky

The application of digital holographic microscope (DHM) imaging and inspection of fine surface structures, dimensions of which are in the range from units of nanometers up to units of micrometers in optical axis direction, is described in this paper. Accurate results of surface structures measurement, in the case the surface profile height is of three orders range, is achieved by simultaneous processing of optically sectioned image intensity and image phase. Surface profile height is roughly specified by the image intensity and the precise height information is acquired from the image phase. Full width at half maximum of the axial intensity response is adjusted properly for particular specimen by the modification of the spectral function of illumination and by resizing of the incoherent illumination source. It means the intervention into spatial and temporal coherence of the illumination. The content of this paper is the description of imaging characteristics of the DHM for individual

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

<a href="/cs/project/LC06040" target="_blank" >LC06040: Struktury pro nanofotoniku a nanoelektroniku</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2008

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proceedings Volume)

ISBN

978-0-8194-7383-7

ISSN

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e-ISSN

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Počet stran výsledku

8

Strana od-do

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Název nakladatele

Society of Photo-Optical Instrumentation Engineers (SPIE)

Místo vydání

Bellingham WA 98225-6705 USA

Místo konání akce

Polanica Zdrój, Poland

Datum konání akce

8. 9. 2008

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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