Estimation of mechanical properties of thin Al surface layer

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F12%3APU101927" target="_blank" >RIV/00216305:26210/12:PU101927 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68081723:_____/12:00387893

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Estimation of mechanical properties of thin Al surface layer

Popis výsledku v původním jazyce

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Název v anglickém jazyce

Estimation of mechanical properties of thin Al surface layer

Popis výsledku anglicky

The paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Microcompression combines the sample preparation with the use of focused ion beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared in Al film using FIB. The typical diameter of pillars was about 1.3 microns and their height was about 2 microns. The results depend on crystallographic orientation of pillar. Stress-strain curves of the thin film were obtained. Experimentally measured data on pillars needs correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Druh

D - Stať ve sborníku

CEP obor

JL - Únava materiálu a lomová mechanika

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

14th International Conference Applied Mechanics 2012

ISBN

978-80-261-0097-3

ISSN

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e-ISSN

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Počet stran výsledku

4

Strana od-do

117-120

Název nakladatele

Neuveden

Místo vydání

Neuveden

Místo konání akce

Plzeň

Datum konání akce

16. 4. 2012

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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