APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS

Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F13%3APU107345" target="_blank" >RIV/00216305:26210/13:PU107345 - isvavai.cz</a>
Výsledek na webu
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DOI - Digital Object Identifier
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Jazyk výsledku
angličtina
Název v původním jazyce
APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS
Popis výsledku v původním jazyce
This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.
Název v anglickém jazyce
APPLICATION OF FEM TO ESTIMATE OF MECHANICAL PROPERTIES OF THIN LAYERS
Popis výsledku anglicky
This paper describes a new method for testing of thin layers, so-called microcompression test. As an example determination of Al thin film properties deposited on Si substrate is introduced in the paper. Experimentally measured data obtained on (micro) pillars need correction to obtain undistorted material properties of Al thin film. A necessary correction using finite element modeling (FEM) is suggested in the paper. The paper contributes to a better characterization of very thin surface layers and determination of their mechanical properties.

Rok uplatnění
2013
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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