Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F26%3A0198114" target="_blank" >RIV/00216305:26210/26:0198114 - isvavai.cz</a>

Výsledek na webu

<a href="https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0042207X25002805?via%3Dihub</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.vacuum.2025.114290" target="_blank" >10.1016/j.vacuum.2025.114290</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Popis výsledku v původním jazyce

A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.

Název v anglickém jazyce

Vacuum micromanipulator upgrading a scanning electron microscope to a new fabrication and characterization tool

Popis výsledku anglicky

A hand-operated micromanipulator extending the capabilities of high-vacuum scanning electron microscopes (SEMs) with optical measurement modes, electrical contacting of structures, and mechanical manipulation was developed. This micromanipulator supports combined four degrees of freedom rotational and sliding movements, achieving positioning accuracy and repeatability to the center of the SEM view-field within the requested ten micrometers. It integrates a manipulator probe or optical fiber that can be easily maneuvered over the sample area inside the SEM chamber. These enable various unique applications, including mechanical manipulation, local electrical probing, cathodoluminescence measurements, local gas injection via photonic crystal optical fiber (PCF), and local thin film heating and evaporation, respectively. Thus, the seamlessly integrated in-house-built micromanipulator facilitates real-time observation and modification of micro- and nanostructures with high precision and versatility, expanding the capabilities of conventional SEMs.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20301 - Mechanical engineering

Projekt

<a href="/cs/project/FW03010504" target="_blank" >FW03010504: Vývoj in-situ technik pro charakterizaci materiálů a nanostruktur</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Vacuum

ISSN

0042-207X

e-ISSN

1879-2715

Svazek periodika

238

Číslo periodika v rámci svazku

114290

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

8

Strana od-do

—

Kód UT WoS článku

001483631700001

EID výsledku v databázi Scopus

2-s2.0-105002281826