Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F04%3APU59213" target="_blank" >RIV/00216305:26220/04:PU59213 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Popis výsledku v původním jazyce

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm theviability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Název v anglickém jazyce

Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures

Popis výsledku anglicky

Either by screen-printing or sputtering, sensitive layers of tin oxide were deposited on silicon micromachined substrates (four-element integrated microarrays). The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The response of the different microarrays to ethanol, acetone and ammonia vapours and their binary mixtures was studied. The influence of ambient humidity was also investigated. By using an integrated array of four integrated microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to simultaneously identify and quantify the different species (success rate was 100%). These results confirm theviability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Sensors and Actuators B: Chemical

ISSN

0925-4005

e-ISSN

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Svazek periodika

103

Číslo periodika v rámci svazku

1-2

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

8

Strana od-do

23-30

Kód UT WoS článku

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EID výsledku v databázi Scopus

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