TEMPERATURE DEPENDENCE OF LOW FREQUENCY NOISE IN TA2O5 FILMS

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

TEMPERATURE DEPENDENCE OF LOW FREQUENCY NOISE IN TA2O5 FILMS

Popis výsledku v původním jazyce

The paper has focused on analysis of noise measurement in Ta2O5 insulating films. Tan-talum pent-oxide thin films are used as dielectric layers for capacitors. Tantalum capacitors show high relative permittivity, low leakage current density and high reliability. The capacitor is here presented as a MIS structure where cathode is formed by manganese-dioxide (with semiconductor conductivity) and anode is formed by tantalum (with metal conductivity). Capacitor is operated in normal mode when the anode is positive and in reverse mode when the cathode is positive. The measurement set-up allows the low frequency noise and capacity measurements in the wide tem-perature range. The Ta2O5 films of the thickness about 28 nm were examined. The current noise spectral density was analyzed for the temperature range from 10 to 400 K. GR noise and 1/fa noise are observed in the low frequency region with exponent a varying between 1 and 1.5. From the measurement of sample capacity for different temperat

Název v anglickém jazyce

TEMPERATURE DEPENDENCE OF LOW FREQUENCY NOISE IN TA2O5 FILMS

Popis výsledku anglicky

The paper has focused on analysis of noise measurement in Ta2O5 insulating films. Tan-talum pent-oxide thin films are used as dielectric layers for capacitors. Tantalum capacitors show high relative permittivity, low leakage current density and high reliability. The capacitor is here presented as a MIS structure where cathode is formed by manganese-dioxide (with semiconductor conductivity) and anode is formed by tantalum (with metal conductivity). Capacitor is operated in normal mode when the anode is positive and in reverse mode when the cathode is positive. The measurement set-up allows the low frequency noise and capacity measurements in the wide tem-perature range. The Ta2O5 films of the thickness about 28 nm were examined. The current noise spectral density was analyzed for the temperature range from 10 to 400 K. GR noise and 1/fa noise are observed in the low frequency region with exponent a varying between 1 and 1.5. From the measurement of sample capacity for different temperat

Druh

D - Stať ve sborníku

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

PROCEEEDINGS OF THE 16TH CONFERENCE - STUDENT EEICT 2010

ISBN

978-80-214-4079-1

ISSN

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e-ISSN

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Počet stran výsledku

4

Strana od-do

351-355

Název nakladatele

NOVPRESS s.r.o.

Místo vydání

nam. Republiky 15 614 00 Brno

Místo konání akce

Brno

Datum konání akce

28. 4. 2011

Typ akce podle státní příslušnosti

CST - Celostátní akce

Kód UT WoS článku

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