Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F15%3APU113252" target="_blank" >RIV/00216305:26220/15:PU113252 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1515/msp-2015-0036" target="_blank" >http://dx.doi.org/10.1515/msp-2015-0036</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1515/msp-2015-0036" target="_blank" >10.1515/msp-2015-0036</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Popis výsledku v původním jazyce

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties

Název v anglickém jazyce

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Popis výsledku anglicky

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

MATERIALS SCIENCE-POLAND

ISSN

0137-1339

e-ISSN

—

Svazek periodika

33

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

PL - Polská republika

Počet stran výsledku

10

Strana od-do

175-184

Kód UT WoS článku

000352510200025

EID výsledku v databázi Scopus

2-s2.0-84929460598