Fabrication of metal-ceramic matrix composite multilayer coatings with diamond protective layer for heating elements in the vacuum systems

Kód výsledku v IS VaVaI

RIV/00216305:26620/23:PU149607 - isvavai.cz

Výsledek na webu

https://www.sciencedirect.com/science/article/pii/S0042207X23003287?via%3Dihub

DOI - Digital Object Identifier

10.1016/j.vacuum.2023.112131

Jazyk výsledku

angličtina

Název v původním jazyce

Fabrication of metal-ceramic matrix composite multilayer coatings with diamond protective layer for heating elements in the vacuum systems

Popis výsledku v původním jazyce

We report a novel methodical approach to the design of multilayer composite coatings with a final diamond protective layer for vacuum applications, specifically for controlled heating in vacuum apparatus, cryogenic systems, and for space applications. Diamond is a promising option to add unique properties to such multilayers while maintaining fast and uniform heat distribution. The multilayer composite systems were based on the insulating layer -Al2O3, a Cu-based interconnect layer and a TiO2-based heating element. The study demon-strated the compactness and high temperature resistance of the developed composite system, which are neces-sary for real-world applications. To enhance the functional properties of the deposited multilayer coatings, diamond films were deposited on them using microwave plasma enhanced chemical vapor deposition (MPCVD). The diamond film was deposited as the last layer of the metal-ceramic multilayer coating prepared from various powders using high velocity oxygen fuel (HVOF) and atmospheric plasma spraying (APS) deposition techniques.

Název v anglickém jazyce

Fabrication of metal-ceramic matrix composite multilayer coatings with diamond protective layer for heating elements in the vacuum systems

Popis výsledku anglicky

We report a novel methodical approach to the design of multilayer composite coatings with a final diamond protective layer for vacuum applications, specifically for controlled heating in vacuum apparatus, cryogenic systems, and for space applications. Diamond is a promising option to add unique properties to such multilayers while maintaining fast and uniform heat distribution. The multilayer composite systems were based on the insulating layer -Al2O3, a Cu-based interconnect layer and a TiO2-based heating element. The study demon-strated the compactness and high temperature resistance of the developed composite system, which are neces-sary for real-world applications. To enhance the functional properties of the deposited multilayer coatings, diamond films were deposited on them using microwave plasma enhanced chemical vapor deposition (MPCVD). The diamond film was deposited as the last layer of the metal-ceramic multilayer coating prepared from various powders using high velocity oxygen fuel (HVOF) and atmospheric plasma spraying (APS) deposition techniques.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

FW03010377: Výzkum a vývoj elektrovodivých keramických kompozitních povlaků.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2023

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

VACUUM

ISSN

1879-2715

e-ISSN

—

Svazek periodika

213

Číslo periodika v rámci svazku

1

Stát vydavatele periodika

GB - Spojené království Velké Británie a Severního Irska

Počet stran výsledku

5

Strana od-do

„“-„“

Kód UT WoS článku

001001259100001

EID výsledku v databázi Scopus

2-s2.0-85156193352