Rapid Cross-sectioning of Challenging Samples Using a Combination of TRUE X-sectioning and the Rocking Stage Techniques

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F01733214%3A_____%2F17%3AN0000001" target="_blank" >RIV/01733214:_____/17:N0000001 - isvavai.cz</a>

Výsledek na webu

<a href="https://ieeexplore.ieee.org/document/8060168/" target="_blank" >https://ieeexplore.ieee.org/document/8060168/</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1109/IPFA.2017.8060168" target="_blank" >10.1109/IPFA.2017.8060168</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Rapid Cross-sectioning of Challenging Samples Using a Combination of TRUE X-sectioning and the Rocking Stage Techniques

Popis výsledku v původním jazyce

An advanced sample preparation protocol using Xe+ Plasma FIB for cross-sections wider than 400 µm is proposed. Challenging samples such as a BGA (CSP) or chip in a package often suffer from FIB milling artifacts. The results are unsatisfactory mainly due to different milling rates of the various materials (polyimide, tin, copper), ion beam induced ripples or due to significant topography. The process parameters of the proposed approach are compared with the standard methods with respect to cross-section quality as well as preparation time. The new approach is then combined with the Rocking stage which greatly improves cross-section quality.

Název v anglickém jazyce

Rapid Cross-sectioning of Challenging Samples Using a Combination of TRUE X-sectioning and the Rocking Stage Techniques

Popis výsledku anglicky

An advanced sample preparation protocol using Xe+ Plasma FIB for cross-sections wider than 400 µm is proposed. Challenging samples such as a BGA (CSP) or chip in a package often suffer from FIB milling artifacts. The results are unsatisfactory mainly due to different milling rates of the various materials (polyimide, tin, copper), ion beam induced ripples or due to significant topography. The process parameters of the proposed approach are compared with the standard methods with respect to cross-section quality as well as preparation time. The new approach is then combined with the Rocking stage which greatly improves cross-section quality.

Druh

J_ost - Ostatní články v recenzovaných periodicích

CEP obor

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OECD FORD obor

21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)

Projekt

<a href="/cs/project/TE01020233" target="_blank" >TE01020233: Platforma pokročilých mikroskopických a spektroskopických technik pro nano a mikrotechnologie</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

2017 IEEE 24th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)

ISSN

1946-1550

e-ISSN

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Svazek periodika

—

Číslo periodika v rámci svazku

2017

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

3

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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