Increasing FA Throughput in Challenging Samples Utilizing TRUE X-sectioning and the Rocking Stage

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F01733214%3A_____%2F17%3AN0000003" target="_blank" >RIV/01733214:_____/17:N0000003 - isvavai.cz</a>

Výsledek na webu

<a href="https://asm.confex.com/asm/istfa17/webprogram/Paper44139.html" target="_blank" >https://asm.confex.com/asm/istfa17/webprogram/Paper44139.html</a>

DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Increasing FA Throughput in Challenging Samples Utilizing TRUE X-sectioning and the Rocking Stage

Popis výsledku v původním jazyce

An advanced sample preparation protocol using Xe+ Plasma FIB for increasing FA throughput is proposed. We prepared cross-sections of 400 μm and wider in challenging samples such as a BGA (CSP), bond wires in mold compound or a TSV array. These often suffer from FIB milling artifacts. The unsatisfactory quality of the cross-section face is mainly due to extremely different milling rates of the various materials (polyimide, tin, copper, mold compound, platinum), ion beam induced ripples [1] or due to significant surface topography. We explored the usability of the protocol for standard crosssections and also tested the preparation of TEM lamellae. The process parameters of the proposed approach were compared with the standard methods of Xe+ Plasma FIB FA with respect to preparation time and cross-section quality. Aiming for ultimate results, we incorporated the Rocking stage technique which also greatly improves cross-section quality.

Název v anglickém jazyce

Increasing FA Throughput in Challenging Samples Utilizing TRUE X-sectioning and the Rocking Stage

Popis výsledku anglicky

An advanced sample preparation protocol using Xe+ Plasma FIB for increasing FA throughput is proposed. We prepared cross-sections of 400 μm and wider in challenging samples such as a BGA (CSP), bond wires in mold compound or a TSV array. These often suffer from FIB milling artifacts. The unsatisfactory quality of the cross-section face is mainly due to extremely different milling rates of the various materials (polyimide, tin, copper, mold compound, platinum), ion beam induced ripples [1] or due to significant surface topography. We explored the usability of the protocol for standard crosssections and also tested the preparation of TEM lamellae. The process parameters of the proposed approach were compared with the standard methods of Xe+ Plasma FIB FA with respect to preparation time and cross-section quality. Aiming for ultimate results, we incorporated the Rocking stage technique which also greatly improves cross-section quality.

Druh

D - Stať ve sborníku

CEP obor

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OECD FORD obor

21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)

Projekt

<a href="/cs/project/TE01020233" target="_blank" >TE01020233: Platforma pokročilých mikroskopických a spektroskopických technik pro nano a mikrotechnologie</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

ISTFA 2017: Proceedings from the 43rd International Symposium for Testing and Failure Analysis

ISBN

978-1-62708-150-4

ISSN

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e-ISSN

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Počet stran výsledku

5

Strana od-do

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Název nakladatele

ASM International

Místo vydání

Pasadena

Místo konání akce

Pasadena

Datum konání akce

1. 1. 2017

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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