A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F00%3A00000556" target="_blank" >RIV/44555601:13430/00:00000556 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma

Popis výsledku v původním jazyce

For a number of applications of plasma in surface processing it is helpful to know the nature and relative abundances of the neutral species present in the plasma. This is our case in the plasma oxidation process using oxygen/argon plasma. The analysis of plasma gas neutral species provides data for detailed study of plasma chemistry. This work deals with using quadrupole mass spectrometer (QMS) which is embodied in a residual gas analyser (RGA) or in an online gas analysis system to sample high pressure gasses. The system was used for the detection of neutral species effusing from discharge tube during plasma processing. In this case the gas pressure must be reduced from 10-1 - 1 torr range to 10-5 torr. We give a description of design that sort of pressure reduction system. To achieve a fast response time the pressure reduction system is pumped. From the active plasma zone a small amount of the process gas was extracted and transported through pressure reduction system to QMS. From t

Název v anglickém jazyce

A Quadrupole Mass Spectrometry Method for Study of Neutral Species of Processing Plasma

Popis výsledku anglicky

For a number of applications of plasma in surface processing it is helpful to know the nature and relative abundances of the neutral species present in the plasma. This is our case in the plasma oxidation process using oxygen/argon plasma. The analysis of plasma gas neutral species provides data for detailed study of plasma chemistry. This work deals with using quadrupole mass spectrometer (QMS) which is embodied in a residual gas analyser (RGA) or in an online gas analysis system to sample high pressure gasses. The system was used for the detection of neutral species effusing from discharge tube during plasma processing. In this case the gas pressure must be reduced from 10-1 - 1 torr range to 10-5 torr. We give a description of design that sort of pressure reduction system. To achieve a fast response time the pressure reduction system is pumped. From the active plasma zone a small amount of the process gas was extracted and transported through pressure reduction system to QMS. From t

Druh

A - Audiovizuální tvorba

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2000

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

ISBN

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Místo vydání

Pula

Název nakladatele resp. objednatele

Croatian Vacuum Society

Verze

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Identifikační číslo nosiče

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