The Mass Spectrometry Study of Plasma Composition during Plasma Oxidation of Thin Metal

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F01%3A00001433" target="_blank" >RIV/44555601:13430/01:00001433 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

The Mass Spectrometry Study of Plasma Composition during Plasma Oxidation of Thin Metal

Popis výsledku v původním jazyce

All impurities even in small concentrations can play a significant role in plasma technologies. In our experiment the influence of impurities on the oxidation process in oxygen and oxygen/argon plasma was studied. The mass spectrometry analysis of plasmacomposition of the neutral process gas was extracted from the active plasma zone and transported through the pressure reduction system to the QMS sampling cell. New software for the mass spectra analysis based on the calculation of relative representation of species in measured spectra using library databases was created. The analysis of the QMS spectra during plasma oxidation gives an information on changes in the plasma gas composition inside the discharge tube and conseguntly on the stability and reproducibility of the plasma process.

Název v anglickém jazyce

The Mass Spectrometry Study of Plasma Composition during Plasma Oxidation of Thin Metal

Popis výsledku anglicky

All impurities even in small concentrations can play a significant role in plasma technologies. In our experiment the influence of impurities on the oxidation process in oxygen and oxygen/argon plasma was studied. The mass spectrometry analysis of plasmacomposition of the neutral process gas was extracted from the active plasma zone and transported through the pressure reduction system to the QMS sampling cell. New software for the mass spectra analysis based on the calculation of relative representation of species in measured spectra using library databases was created. The analysis of the QMS spectra during plasma oxidation gives an information on changes in the plasma gas composition inside the discharge tube and conseguntly on the stability and reproducibility of the plasma process.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/OC%20527.50" target="_blank" >OC 527.50: Studium tenkých polymerních vrstev pomocí AFM a rozvoj metod diagnostiky plazmatu.</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2001

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Le Vide: science, technigue et application

ISSN

1266-0167

e-ISSN

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Svazek periodika

56

Číslo periodika v rámci svazku

300

Stát vydavatele periodika

FR - Francouzská republika

Počet stran výsledku

3

Strana od-do

186-188

Kód UT WoS článku

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EID výsledku v databázi Scopus

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