Study of Plasma Composition during Plasma Oxidation: The Mass Spectrometry Study

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F03%3A00002319" target="_blank" >RIV/44555601:13430/03:00002319 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Study of Plasma Composition during Plasma Oxidation: The Mass Spectrometry Study

Popis výsledku v původním jazyce

The experiments were carried out in the system for the plasma chemical surface modification of thin metal films. The on-line gas analysis system is used for the mass spectrometry study of plasma composition during plasma oxidation of thin tin layers. A small amount of the neutral plasma gas phase is extracted from the active plasma zone and transported through the pressure reduction system to the sampling cell with quadrupole mass spectrometer (Balzers QMG 112). In addition to the comparative study of the plasma gas phase composition a gas chromatograph (HP 5890) was used. The direct coupling and sample injection to the gas chromatograph is not possible in our experimental set-up. A transportable sampling system was used. The quadrupole mass spectrometry and gas chromatography analysis of the process gas composition during plasma oxidation provide a basic information about changes in the plasma gas composition inside the discharge tube and consequently about the stability and reproduci

Název v anglickém jazyce

Study of Plasma Composition during Plasma Oxidation: The Mass Spectrometry Study

Popis výsledku anglicky

The experiments were carried out in the system for the plasma chemical surface modification of thin metal films. The on-line gas analysis system is used for the mass spectrometry study of plasma composition during plasma oxidation of thin tin layers. A small amount of the neutral plasma gas phase is extracted from the active plasma zone and transported through the pressure reduction system to the sampling cell with quadrupole mass spectrometer (Balzers QMG 112). In addition to the comparative study of the plasma gas phase composition a gas chromatograph (HP 5890) was used. The direct coupling and sample injection to the gas chromatograph is not possible in our experimental set-up. A transportable sampling system was used. The quadrupole mass spectrometry and gas chromatography analysis of the process gas composition during plasma oxidation provide a basic information about changes in the plasma gas composition inside the discharge tube and consequently about the stability and reproduci

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/OC%20527.50" target="_blank" >OC 527.50: Studium tenkých polymerních vrstev pomocí AFM a rozvoj metod diagnostiky plazmatu.</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Le Vide :science, technique et application

ISSN

1266-0167

e-ISSN

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Svazek periodika

58

Číslo periodika v rámci svazku

307-suppl.

Stát vydavatele periodika

FR - Francouzská republika

Počet stran výsledku

3

Strana od-do

228-230

Kód UT WoS článku

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EID výsledku v databázi Scopus

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