Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas

Popis výsledku v původním jazyce

The Fe doped SnO2 thin films for gas sensors applications were deposited by RF magnetron cosputtering of SnO2 and Fe dopand using a single sputter target with a variable SnO2/Fe ratio in the argon gas. The coatings were deposited in two different off-axis positions. The first position, the angle between planes of the substrate and target was 30o from parallel plane where the upside of substrate was toward to the target to allow shadowing effects. The second position was selected to reduce a higher energy ion bombardment on the growing film by positioning substrate perpendicular to target. The surface morphology of the films was controlled from very smooth up to orange-peel like structure simply by RF power and the position of substrates. The Fe contentin coating was tunable in wide range by adjusting Fe ratio on the target and by variation of RF power. The Fe content was evaluated from XPS spectra by deconvolution of two overlapped peaks Sn 3p and Fe 2p and from RBS. Beam of He+ ions

Název v anglickém jazyce

Properties of Magnetron Deposited Variable Fe Doped SnO2 Thin Films for Gas

Popis výsledku anglicky

The Fe doped SnO2 thin films for gas sensors applications were deposited by RF magnetron cosputtering of SnO2 and Fe dopand using a single sputter target with a variable SnO2/Fe ratio in the argon gas. The coatings were deposited in two different off-axis positions. The first position, the angle between planes of the substrate and target was 30o from parallel plane where the upside of substrate was toward to the target to allow shadowing effects. The second position was selected to reduce a higher energy ion bombardment on the growing film by positioning substrate perpendicular to target. The surface morphology of the films was controlled from very smooth up to orange-peel like structure simply by RF power and the position of substrates. The Fe contentin coating was tunable in wide range by adjusting Fe ratio on the target and by variation of RF power. The Fe content was evaluated from XPS spectra by deconvolution of two overlapped peaks Sn 3p and Fe 2p and from RBS. Beam of He+ ions

Druh

D - Stať ve sborníku

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2009

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Book of Contributed Papers of 17th Symposium on Application of Plasma Processe- Visegrad Workshop on Research of Plasma Physics

ISBN

978-80-89186-46-4

ISSN

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e-ISSN

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Počet stran výsledku

2

Strana od-do

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Název nakladatele

Comenius University in Bratislava; Humboldt-Club Slovakia Bratislava

Místo vydání

Bratislava, Slovakia

Místo konání akce

Liptovský Ján, Slovakia

Datum konání akce

17. 1. 2009

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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