Preparation of pulsed DC magnetron deposited Fe-doped SnO2 coatings

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F16%3A43887753" target="_blank" >RIV/44555601:13440/16:43887753 - isvavai.cz</a>

Výsledek na webu

<a href="http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532882/pdf" target="_blank" >http://onlinelibrary.wiley.com/doi/10.1002/pssa.201532882/pdf</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssa.201532882" target="_blank" >10.1002/pssa.201532882</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Preparation of pulsed DC magnetron deposited Fe-doped SnO2 coatings

Popis výsledku v původním jazyce

Iron-doped SnO2 coatings were deposited in a 50 kHz DCpulsed magnetron sputtering discharge. The pulses had a duration of 4 ms in selected gas mixtures from pure argon up to 60% of oxygen at a constant total pressure of 0.2 Pa. A single target of SnO2 with Fe inset was used. The mass spectrometry study detected the gas-related ions Ar?, O2 ? and O?, where the last one becomes the dominant positive ion at higher oxygen contents. Atomic oxygen ions had a higher energy as it resulted from the collision-caused dissociation on the target surface. The tin-related species were detected as Sn? and SnO?. SnO2 ? species were not detected. The deposition rate decreased by using gas mixtures with oxygen as well as the corresponding amount of Sn-related species in the plasma. The increase of oxygen also increased significantly the sheet resistance of the films. The XPS study showed that the iron concentration decreased by using additional oxygen. But the O/Sn ratio in the coatings was constant, contrary to the increased FeO/Fe ratio in the films. An additional analysis of the coatings by spectroscopic ellipsometry has shown a dependence of the polarizability and the permittivity on the amount of oxygen used during the deposition. In contrast, the study has found no such dependence for the absorption of the layers.

Název v anglickém jazyce

Preparation of pulsed DC magnetron deposited Fe-doped SnO2 coatings

Popis výsledku anglicky

Iron-doped SnO2 coatings were deposited in a 50 kHz DCpulsed magnetron sputtering discharge. The pulses had a duration of 4 ms in selected gas mixtures from pure argon up to 60% of oxygen at a constant total pressure of 0.2 Pa. A single target of SnO2 with Fe inset was used. The mass spectrometry study detected the gas-related ions Ar?, O2 ? and O?, where the last one becomes the dominant positive ion at higher oxygen contents. Atomic oxygen ions had a higher energy as it resulted from the collision-caused dissociation on the target surface. The tin-related species were detected as Sn? and SnO?. SnO2 ? species were not detected. The deposition rate decreased by using gas mixtures with oxygen as well as the corresponding amount of Sn-related species in the plasma. The increase of oxygen also increased significantly the sheet resistance of the films. The XPS study showed that the iron concentration decreased by using additional oxygen. But the O/Sn ratio in the coatings was constant, contrary to the increased FeO/Fe ratio in the films. An additional analysis of the coatings by spectroscopic ellipsometry has shown a dependence of the polarizability and the permittivity on the amount of oxygen used during the deposition. In contrast, the study has found no such dependence for the absorption of the layers.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GA13-06989S" target="_blank" >GA13-06989S: Plazmo-chemické modifikace fylosilikátů pro funkční nanostruktury</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica Status Solidi A

ISSN

1862-6300

e-ISSN

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Svazek periodika

213

Číslo periodika v rámci svazku

9

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

7

Strana od-do

2303-2309

Kód UT WoS článku

000388318600005

EID výsledku v databázi Scopus

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