Thermal conductivity of high-temperature Si-B-C-N thin films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F11%3A43896514" target="_blank" >RIV/49777513:23520/11:43896514 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.07.058" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.07.058</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.07.058" target="_blank" >10.1016/j.surfcoat.2011.07.058</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Thermal conductivity of high-temperature Si-B-C-N thin films

Popis výsledku v původním jazyce

In this study, thermal transport was investigated for ceramic films with different silicon, boron, carbon, and nitrogen (Si-B-C-N) compositions. In order to investigate the effect of morphology on thermal barrier properties, the microstructure of these materials was varied from amorphous to nanocrystalline. Thermal conductivity trends of several ceramic thin films were characterized with a TDTR technique. Samples containing two different Si-B-C-N chemical compositions were created by reactive magnetronsputtering and then subjected to annealing at temperatures up to 1400 °C. The room temperature thermal conductivity of the samples prepared via a 50% argon/50% nitrogen gas mixture remained constant, while samples prepared via a 75% argon/25% nitrogen gas mixture exhibited an increase in the thermal conductivity. The experiments reveal which Si-B-C-N film composition remains stable in the amorphous state at high temperatures, thereby retaining lower thermal transport properties.

Název v anglickém jazyce

Thermal conductivity of high-temperature Si-B-C-N thin films

Popis výsledku anglicky

In this study, thermal transport was investigated for ceramic films with different silicon, boron, carbon, and nitrogen (Si-B-C-N) compositions. In order to investigate the effect of morphology on thermal barrier properties, the microstructure of these materials was varied from amorphous to nanocrystalline. Thermal conductivity trends of several ceramic thin films were characterized with a TDTR technique. Samples containing two different Si-B-C-N chemical compositions were created by reactive magnetronsputtering and then subjected to annealing at temperatures up to 1400 °C. The room temperature thermal conductivity of the samples prepared via a 50% argon/50% nitrogen gas mixture remained constant, while samples prepared via a 75% argon/25% nitrogen gas mixture exhibited an increase in the thermal conductivity. The experiments reveal which Si-B-C-N film composition remains stable in the amorphous state at high temperatures, thereby retaining lower thermal transport properties.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/OC10045" target="_blank" >OC10045: Nové plazmové zdroje pro depozici vrstev a modifikaci povrchů</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface & Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

206

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

4

Strana od-do

2030-2033

Kód UT WoS článku

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EID výsledku v databázi Scopus

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