On surface temperatures during high power pulsed magnetron sputtering using a hot target
Identifikátory výsledku
Kód výsledku v IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F11%3A43898419" target="_blank" >RIV/49777513:23520/11:43898419 - isvavai.cz</a>
Nalezeny alternativní kódy
RIV/49777513:23640/11:43898419
Výsledek na webu
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.08.005" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2011.08.005</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.surfcoat.2011.08.005" target="_blank" >10.1016/j.surfcoat.2011.08.005</a>
Alternativní jazyky
Jazyk výsledku
angličtina
Název v původním jazyce
On surface temperatures during high power pulsed magnetron sputtering using a hot target
Popis výsledku v původním jazyce
A study of temperature of a magnetron target was performed for the case of high power pulsed magnetron sputtering (HPPMS) of titanium thin films, using a water-cooled target and a hot target. Temporal evolution and spatial distribution of surface temperature were investigated by an infrared camera for target diameter of 100 mm, pulse repetition frequencies of 1 and 10 kHz, and discharge average pulse currents of from 2.5 to 35 A. For the case of hot target, surface temperature of the erosion zone increased up to 1750 °C and melting occurred. Infrared camera measurements were precisely calibrated by a presence of solid state phase transformation in titanium. The target melting was analysed in detail. The dependencies of maximum temperature on average pulse current and on average target power density for the case of hot target revealed the existence of heat losses other than radiation at temperatures above 1500 °C, which correlates with higher erosion and deposition rates shown in anothe
Název v anglickém jazyce
On surface temperatures during high power pulsed magnetron sputtering using a hot target
Popis výsledku anglicky
A study of temperature of a magnetron target was performed for the case of high power pulsed magnetron sputtering (HPPMS) of titanium thin films, using a water-cooled target and a hot target. Temporal evolution and spatial distribution of surface temperature were investigated by an infrared camera for target diameter of 100 mm, pulse repetition frequencies of 1 and 10 kHz, and discharge average pulse currents of from 2.5 to 35 A. For the case of hot target, surface temperature of the erosion zone increased up to 1750 °C and melting occurred. Infrared camera measurements were precisely calibrated by a presence of solid state phase transformation in titanium. The target melting was analysed in detail. The dependencies of maximum temperature on average pulse current and on average target power density for the case of hot target revealed the existence of heat losses other than radiation at temperatures above 1500 °C, which correlates with higher erosion and deposition rates shown in anothe
Klasifikace
Druh
J<sub>x</sub> - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)
CEP obor
BL - Fyzika plasmatu a výboje v plynech
OECD FORD obor
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Návaznosti výsledku
Projekt
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Návaznosti
Z - Vyzkumny zamer (s odkazem do CEZ)
Ostatní
Rok uplatnění
2011
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Údaje specifické pro druh výsledku
Název periodika
Surface and Coatings Technology
ISSN
0257-8972
e-ISSN
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Svazek periodika
206
Číslo periodika v rámci svazku
6
Stát vydavatele periodika
CH - Švýcarská konfederace
Počet stran výsledku
5
Strana od-do
1155-1159
Kód UT WoS článku
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EID výsledku v databázi Scopus
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