Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F12%3A43915258" target="_blank" >RIV/49777513:23520/12:43915258 - isvavai.cz</a>

Výsledek na webu

<a href="http://www.sciencedirect.com/science/article/pii/S0257897212003222" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0257897212003222</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.04.028" target="_blank" >10.1016/j.surfcoat.2012.04.028</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

Popis výsledku v původním jazyce

The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlledby the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elasticrecovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

Název v anglickém jazyce

Two-phase single layer Al-O-N nanocomposite films with enhanced resistance to cracking

Popis výsledku anglicky

The article reports on dc pulsed reactive sputtering of two-phase single layer Al-O-N nanocomposite films using dual magnetron in a mixture of N2+O2 with pulsed inlet of oxygen. Two kinds of nanocomposite films weresputtered: (1) nc-AlN/a-(Al-O-N) film and (2) nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite film; here nc- and a- denotes the nanocrystalline and amorphous phase, respectively. The transition from the nc-AlN/a-(Al-O-N) nanocomposite to the nc-(gamma-Al2O3)/a-(Al-O-N) nanocomposite was controlledby the length of the period of oxygen pulses. It was found that both nanocomposites are highly elastic films with relatively high hardness H = 15 to 20 GPa, low effective Young's modulus E* satisfying the condition that the ratio H/E* } 0.1,high elasticrecovery We } 60% and high resistance to cracking in bending. Correlations between the film structure and its mechanical properties are discussed in detail.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

<a href="/cs/project/GAP108%2F12%2F0393" target="_blank" >GAP108/12/0393: Tvrdé nanokompozitní vrstvy se zvýšenou houževnatostí a unikátními vlastnostmi</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

206

Číslo periodika v rámci svazku

19-20

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

4230-4234

Kód UT WoS článku

000305662400056

EID výsledku v databázi Scopus

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