The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F12%3A43915535" target="_blank" >RIV/49777513:23520/12:43915535 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.07.017" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2012.07.017</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.07.017" target="_blank" >10.1016/j.surfcoat.2012.07.017</a>

Jazyk výsledku

angličtina

Název v původním jazyce

The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking

Popis výsledku v původním jazyce

The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with different Zr/Al ratio were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate fixed to the magnetron cathode by a Zr fixing ring. The content of Al in the Zr-Al-O film was controlled by inner diameter of Zr ring. It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline zirconium dioxide phase and the amorphous alumina phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with valueof Zr/Al less than one are X-ray amorphous and exhibit low hardness, an effective Young's modulus resulting in a low hardness to effective Young's modulus ratio and low elastic recovery and (ii) the Zr-Al-O films with value of Zr/Al high

Název v anglickém jazyce

The effect of addition of Al in zirkonium dioxide thin film on its resistance to cracking

Popis výsledku anglicky

The paper reports on the structure, mechanical and optical properties of sputtered Zr-Al-O films. The Zr-Al-O films with different Zr/Al ratio were prepared by a reactive sputtering using ac pulse dual magnetrons. The magnetrons were equipped with a target composed of Al plate fixed to the magnetron cathode by a Zr fixing ring. The content of Al in the Zr-Al-O film was controlled by inner diameter of Zr ring. It makes possible to control effectively the structure of the Zr-Al-O film determined by a mixture of the crystalline zirconium dioxide phase and the amorphous alumina phase. The effect of Al content on the structure, mechanical and optical properties of the Zr-Al-O film is investigated in detail. It was found that (i) the Zr-Al-O films with valueof Zr/Al less than one are X-ray amorphous and exhibit low hardness, an effective Young's modulus resulting in a low hardness to effective Young's modulus ratio and low elastic recovery and (ii) the Zr-Al-O films with value of Zr/Al high

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

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Svazek periodika

2012

Číslo periodika v rámci svazku

207

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

6

Strana od-do

355-360

Kód UT WoS článku

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EID výsledku v databázi Scopus

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