Reactive high-power impulse magnetron sputtering of ZrO2 films with gradient ZrOx interlayers on pretreated steel substrates

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931491" target="_blank" >RIV/49777513:23520/17:43931491 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1116/1.4978037" target="_blank" >http://dx.doi.org/10.1116/1.4978037</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1116/1.4978037" target="_blank" >10.1116/1.4978037</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Reactive high-power impulse magnetron sputtering of ZrO2 films with gradient ZrOx interlayers on pretreated steel substrates

Popis výsledku v původním jazyce

High-power impulse magnetron sputtering with a pulsed O2 flow control was used for reactive depositions of densified stoichiometric ZrO2 films with gradient ZrOx interlayers onto floating Si and steel substrates at low substrate temperatures (less than 150 °C). The depositions were performed using a strongly unbalanced magnetron with a planar Zr target of 100 mm diameter in Ar+O2 gas mixtures at the total pressure close to 2 Pa. Two kinds of gradient ZrOx interlayers with different depth profiles of the stoichiometric coefficient x were deposited using the feed-back pulsed O2 flow control. Prior to deposition, a modification of the substrate surfaces was performed by high-power impulse magnetron sputtering of the Zr target in Ar gas at the same pressure of 2 Pa and a dc substrate bias from –965 V to –620 V in a target pulse and low substrate temperatures (less than 150 °C) for 10 min. It was shown that the pretreatment of the steel substrates is a necessary condition for good adhesion of the zirconium oxide (both pure ZrO2 and ZrO2+ZrOx interlayer) films and that the adhesion of the ZrO2 films is substantially higher when the gradient ZrOx interlayers are used. The densified stoichiometric ZrO2 films (refractive index of 2.21 and extinction coefficient of 0.0004 at the wavelength of 550 nm) deposited onto the gradient ZrOx interlayers exhibited a high hardness (15–16 GPa) and an enhanced resistance to cracking.

Název v anglickém jazyce

Reactive high-power impulse magnetron sputtering of ZrO2 films with gradient ZrOx interlayers on pretreated steel substrates

Popis výsledku anglicky

High-power impulse magnetron sputtering with a pulsed O2 flow control was used for reactive depositions of densified stoichiometric ZrO2 films with gradient ZrOx interlayers onto floating Si and steel substrates at low substrate temperatures (less than 150 °C). The depositions were performed using a strongly unbalanced magnetron with a planar Zr target of 100 mm diameter in Ar+O2 gas mixtures at the total pressure close to 2 Pa. Two kinds of gradient ZrOx interlayers with different depth profiles of the stoichiometric coefficient x were deposited using the feed-back pulsed O2 flow control. Prior to deposition, a modification of the substrate surfaces was performed by high-power impulse magnetron sputtering of the Zr target in Ar gas at the same pressure of 2 Pa and a dc substrate bias from –965 V to –620 V in a target pulse and low substrate temperatures (less than 150 °C) for 10 min. It was shown that the pretreatment of the steel substrates is a necessary condition for good adhesion of the zirconium oxide (both pure ZrO2 and ZrO2+ZrOx interlayer) films and that the adhesion of the ZrO2 films is substantially higher when the gradient ZrOx interlayers are used. The densified stoichiometric ZrO2 films (refractive index of 2.21 and extinction coefficient of 0.0004 at the wavelength of 550 nm) deposited onto the gradient ZrOx interlayers exhibited a high hardness (15–16 GPa) and an enhanced resistance to cracking.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/GA14-03875S" target="_blank" >GA14-03875S: Nanostrukturní multifunkční povlaky připravené užitím silně ionizovaného pulzního plazmatu</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Journal of Vacuum Science and Technology A

ISSN

0734-2101

e-ISSN

—

Svazek periodika

35

Číslo periodika v rámci svazku

3

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

„031503-1“-„031503-9“

Kód UT WoS článku

000401122700025

EID výsledku v databázi Scopus

2-s2.0-85015620502