(Zr,Ti,O) alloy films with enhanced hardness and resistance to cracking prepared by magnetron sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F17%3A43931824" target="_blank" >RIV/49777513:23520/17:43931824 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.05.006" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2017.05.006</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2017.05.006" target="_blank" >10.1016/j.surfcoat.2017.05.006</a>

Jazyk výsledku

angličtina

Název v původním jazyce

(Zr,Ti,O) alloy films with enhanced hardness and resistance to cracking prepared by magnetron sputtering

Popis výsledku v původním jazyce

The article reports on the effect of (i) the ion bombardment and (ii) the addition of small amount of oxygen into Ar sputtering gas on the structure, microstructure, mechanical properties and macrostress of the (Zr,Ti) alloy films prepared by DC magnetron sputtering. Properties of the (Zr,Ti) alloy films with three different elemental compositions – (1) Zr95Ti5, (2) Zr30Ti70 and (3) Zr5Ti95 were investigated in detail. It was found that (1) the (Zr,Ti) alloy films sputtered at a low value of the negative substrate bias Us = − 50 V are well crystalline, (2) the (Zr,Ti) alloy films sputtered at high values of the negative substrate bias | Us | ≥ 150 V are nanocrystalline, (3) the (Zr,Ti) alloy films, sputtered at all substrate biases Us used in our experiments and ranging from − 50 to − 250 V, exhibit low hardness H &lt; 10 GPa, low ratio H/E* &lt; 0.1, low elastic recovery We &lt; 60% and low resistance to cracking and (4) the addition of small amount of oxygen in Ar sputtering gas makes it possible to sputter nanocrystalline (Zr,Ti,O) alloy films with high hardness H &gt; 10 GPa, high ratio H/E* ≥ 0.1, high elastic recovery We ≥ 60% and enhanced resistance to cracking; here E* is the effective Young&apos;s modulus. The main result of the presented investigation is the demonstration that the incorporation of a small amount of O in a (Zr,Ti) alloy film is a very effective way to increase its hardness and to form the flexible (Zr,Ti,O) alloy films with enhanced resistance to cracking.

Název v anglickém jazyce

(Zr,Ti,O) alloy films with enhanced hardness and resistance to cracking prepared by magnetron sputtering

Popis výsledku anglicky

The article reports on the effect of (i) the ion bombardment and (ii) the addition of small amount of oxygen into Ar sputtering gas on the structure, microstructure, mechanical properties and macrostress of the (Zr,Ti) alloy films prepared by DC magnetron sputtering. Properties of the (Zr,Ti) alloy films with three different elemental compositions – (1) Zr95Ti5, (2) Zr30Ti70 and (3) Zr5Ti95 were investigated in detail. It was found that (1) the (Zr,Ti) alloy films sputtered at a low value of the negative substrate bias Us = − 50 V are well crystalline, (2) the (Zr,Ti) alloy films sputtered at high values of the negative substrate bias | Us | ≥ 150 V are nanocrystalline, (3) the (Zr,Ti) alloy films, sputtered at all substrate biases Us used in our experiments and ranging from − 50 to − 250 V, exhibit low hardness H &lt; 10 GPa, low ratio H/E* &lt; 0.1, low elastic recovery We &lt; 60% and low resistance to cracking and (4) the addition of small amount of oxygen in Ar sputtering gas makes it possible to sputter nanocrystalline (Zr,Ti,O) alloy films with high hardness H &gt; 10 GPa, high ratio H/E* ≥ 0.1, high elastic recovery We ≥ 60% and enhanced resistance to cracking; here E* is the effective Young&apos;s modulus. The main result of the presented investigation is the demonstration that the incorporation of a small amount of O in a (Zr,Ti) alloy film is a very effective way to increase its hardness and to form the flexible (Zr,Ti,O) alloy films with enhanced resistance to cracking.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/GA16-18183S" target="_blank" >GA16-18183S: Pokročilé povrchové povlaky se zlepšenými vlastnostmi a teplotní stabilitou</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2017

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

322

Číslo periodika v rámci svazku

AUG 15 2017

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

6

Strana od-do

86-91

Kód UT WoS článku

000403995700012

EID výsledku v databázi Scopus

2-s2.0-85019389088