Tunable composition and properties of Al–O–N films prepared by reactive deep oscillation magnetron sputtering

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F20%3A43958584" target="_blank" >RIV/49777513:23520/20:43958584 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1016/j.surfcoat.2020.125716" target="_blank" >https://doi.org/10.1016/j.surfcoat.2020.125716</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2020.125716" target="_blank" >10.1016/j.surfcoat.2020.125716</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Tunable composition and properties of Al–O–N films prepared by reactive deep oscillation magnetron sputtering

Popis výsledku v původním jazyce

We report a low-temperature deposition of Al–O–N films in a wide range of compositions. We use and explain the advantages of reactive deep oscillation magnetron sputtering (leading to suppressed arcing on the Al target) with a pulsed reactive gas flow control and optimized reactive gas inlet position (leading to a very smooth composition control, despite the different reactivities of O2 and N2). Next, we focus on the relationships between film composition, structure and functional properties. We demonstrate a smoothly controlled refractive index at a very low extinction coefficient, and identify the Al–O–N composition leading to the highest hardness, elastic recovery and elastic strain to failure. We discuss some of the technological applications which these properties are useful for.

Název v anglickém jazyce

Tunable composition and properties of Al–O–N films prepared by reactive deep oscillation magnetron sputtering

Popis výsledku anglicky

We report a low-temperature deposition of Al–O–N films in a wide range of compositions. We use and explain the advantages of reactive deep oscillation magnetron sputtering (leading to suppressed arcing on the Al target) with a pulsed reactive gas flow control and optimized reactive gas inlet position (leading to a very smooth composition control, despite the different reactivities of O2 and N2). Next, we focus on the relationships between film composition, structure and functional properties. We demonstrate a smoothly controlled refractive index at a very low extinction coefficient, and identify the Al–O–N composition leading to the highest hardness, elastic recovery and elastic strain to failure. We discuss some of the technological applications which these properties are useful for.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20506 - Coating and films

Projekt

<a href="/cs/project/EF17_048%2F0007267" target="_blank" >EF17_048/0007267: VaV inteligentních komponent pokročilých technologií pro plzeňskou metropolitní oblast</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2020

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

392

Číslo periodika v rámci svazku

25 JUN 2020

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

7

Strana od-do

„125716-1“-„125716-7“

Kód UT WoS článku

000528843600002

EID výsledku v databázi Scopus

2-s2.0-85083090607