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On density distribution of Ti atom and ion ground states near the target in HiPIMS discharge using cavity ring-down spectroscopy and laser induced fluorescence

Identifikátory výsledku

  • Kód výsledku v IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F22%3A43965273" target="_blank" >RIV/49777513:23520/22:43965273 - isvavai.cz</a>

  • Výsledek na webu

    <a href="http://doi.org/10.1088/1361-6595/ac6d0b" target="_blank" >http://doi.org/10.1088/1361-6595/ac6d0b</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1088/1361-6595/ac6d0b" target="_blank" >10.1088/1361-6595/ac6d0b</a>

Alternativní jazyky

  • Jazyk výsledku

    angličtina

  • Název v původním jazyce

    On density distribution of Ti atom and ion ground states near the target in HiPIMS discharge using cavity ring-down spectroscopy and laser induced fluorescence

  • Popis výsledku v původním jazyce

    Cavity ring-down spectroscopy combined with laser induced fluorescence was applied during a high-power impulse magnetron sputtering of Ti target to determine the time evolutions and spatial distributions of Ti atom and ion densities of levels belonging to the ground state multiplets (GSM) near the sputtered target. From these densities, an estimate of the time evolution and spatial distribution of the ionization degree near the target was calculated. It was found that the densities (number of particles per unit volume) of levels in GSM of Ti atom and ion increases with their level energies and the highest levels in GSMs show an inversion in their populations (the density of level divided by its statistical weight) during a voltage pulse. The population inversion (a higher population of levels with a higher energy than those with lower ones) is distinct for the highest level in GSM of Ti+ ion and it persists even at 40 µs after the voltage pulse end. The sum of ground state level densities reaches values up to 8.3 × 10^11 1/cm^3 for Ti+ ions above the target racetrack and up to 4.8 × 10^11 1/cm^3 for Ti atoms above the target center for the regime with the peak power density of 498 W/cm^2. A frequent ionization of Ti atoms above the target racetrack is manifested by distinct drops in the Ti atom spatial distribution. This leads to a very high ionization degree up to 94% at the racetrack position and the ionization degree stays also high 40 µs after the voltage pulse termination.

  • Název v anglickém jazyce

    On density distribution of Ti atom and ion ground states near the target in HiPIMS discharge using cavity ring-down spectroscopy and laser induced fluorescence

  • Popis výsledku anglicky

    Cavity ring-down spectroscopy combined with laser induced fluorescence was applied during a high-power impulse magnetron sputtering of Ti target to determine the time evolutions and spatial distributions of Ti atom and ion densities of levels belonging to the ground state multiplets (GSM) near the sputtered target. From these densities, an estimate of the time evolution and spatial distribution of the ionization degree near the target was calculated. It was found that the densities (number of particles per unit volume) of levels in GSM of Ti atom and ion increases with their level energies and the highest levels in GSMs show an inversion in their populations (the density of level divided by its statistical weight) during a voltage pulse. The population inversion (a higher population of levels with a higher energy than those with lower ones) is distinct for the highest level in GSM of Ti+ ion and it persists even at 40 µs after the voltage pulse end. The sum of ground state level densities reaches values up to 8.3 × 10^11 1/cm^3 for Ti+ ions above the target racetrack and up to 4.8 × 10^11 1/cm^3 for Ti atoms above the target center for the regime with the peak power density of 498 W/cm^2. A frequent ionization of Ti atoms above the target racetrack is manifested by distinct drops in the Ti atom spatial distribution. This leads to a very high ionization degree up to 94% at the racetrack position and the ionization degree stays also high 40 µs after the voltage pulse termination.

Klasifikace

  • Druh

    J<sub>imp</sub> - Článek v periodiku v databázi Web of Science

  • CEP obor

  • OECD FORD obor

    10305 - Fluids and plasma physics (including surface physics)

Návaznosti výsledku

  • Projekt

    <a href="/cs/project/GA19-14011S" target="_blank" >GA19-14011S: Design nových funkčních materiálů, a cest pro jejich reaktivní magnetronové naprašování, pomocí pokročilých počítačových simulací</a><br>

  • Návaznosti

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Ostatní

  • Rok uplatnění

    2022

  • Kód důvěrnosti údajů

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Údaje specifické pro druh výsledku

  • Název periodika

    PLASMA SOURCES SCIENCE &amp; TECHNOLOGY

  • ISSN

    0963-0252

  • e-ISSN

    1361-6595

  • Svazek periodika

    31

  • Číslo periodika v rámci svazku

    5

  • Stát vydavatele periodika

    GB - Spojené království Velké Británie a Severního Irska

  • Počet stran výsledku

    7

  • Strana od-do

    "05LT04-1"-"05LT04-7"

  • Kód UT WoS článku

    000798964000001

  • EID výsledku v databázi Scopus

    2-s2.0-85131099865