Optical characterization of polysilicon thin films for solar applications

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23640%2F06%3A00502329" target="_blank" >RIV/49777513:23640/06:00502329 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Optical characterization of polysilicon thin films for solar applications

Popis výsledku v původním jazyce

We report on the results of the investigation of optical properties and structure of PECVD deposited thin films of hydrogenated polysilicon determined by UV- Vis and IR spectroscopy. The influence of the hydrogen dilution of silane plasma at the PECVD deposition on the film properties was investigated. The refractive index, the optical band gap energy and the microstructure of hydrogen and oxygen were analysed. The changes are discussed and correlated with the structure, the changes of the surface morphology and the hydrogen to silicon bonding. The optical band gap becomes larger than that of the undiluted sample. The results show that at dilution between 20 and 30 the transition between amorphous and crystalline phase occurs and the sample becomes a mixture of amorphous, polycrystalline phase with nano-size grains and voids with decreasing hydrogen concentration. The presence of interstitial oxygen and oxygen bonded in the surface Si-OH groups was detected.

Název v anglickém jazyce

Optical characterization of polysilicon thin films for solar applications

Popis výsledku anglicky

We report on the results of the investigation of optical properties and structure of PECVD deposited thin films of hydrogenated polysilicon determined by UV- Vis and IR spectroscopy. The influence of the hydrogen dilution of silane plasma at the PECVD deposition on the film properties was investigated. The refractive index, the optical band gap energy and the microstructure of hydrogen and oxygen were analysed. The changes are discussed and correlated with the structure, the changes of the surface morphology and the hydrogen to silicon bonding. The optical band gap becomes larger than that of the undiluted sample. The results show that at dilution between 20 and 30 the transition between amorphous and crystalline phase occurs and the sample becomes a mixture of amorphous, polycrystalline phase with nano-size grains and voids with decreasing hydrogen concentration. The presence of interstitial oxygen and oxygen bonded in the surface Si-OH groups was detected.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

<a href="/cs/project/LN00B084" target="_blank" >LN00B084: Nové technologie Výzkumné centrum v Západočeském regionu</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2006

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Solar Energy

ISSN

0038-092X

e-ISSN

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Svazek periodika

80

Číslo periodika v rámci svazku

6

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

8

Strana od-do

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Kód UT WoS článku

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EID výsledku v databázi Scopus

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