Srovnácí diagnostika surfatrového výboje v Ar a He pomocí optické emisní spektroskopie a sondových měření

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60076658%3A12410%2F04%3A00005562" target="_blank" >RIV/60076658:12410/04:00005562 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements

Popis výsledku v původním jazyce

The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactivegas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra).

Název v anglickém jazyce

Comparative diagnostics of Ar and He surfatron generated plasma by means of optical emission spectroscopy and probe measurements

Popis výsledku anglicky

The article is focused on comparative diagnostics of microwave plasmas, generated by surfatron, where Ar and He are used as carrier gases N2 is used as reactive gas. The diagnosed microwave-driven plasma source consists of a surfatron powered by a microwave magnetron generator, working at frequency 2.45 GHz in the output power range 0-300 W, which creates plasma from the flowing working gas in a quartz nozzle. The gas flow rate is kept typically constant at 600 sccm but ratio of carrier gas and reactivegas is varied. We present some results of diagnostics of generated plasma at nozzle exit as well as in the nozzle at different experimental conditions: variable absorbed power, total chamber pressure etc. The diagnostics of plasma column was performed by means of double probe measurement (mainly electron temperature is calculated from measured data) and by optical emission spectroscopy (rotational and vibrational temperatures, estimation of plasma composition from overview spectra).

Druh

D - Stať ve sborníku

CEP obor

BL - Fyzika plasmatu a výboje v plynech

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

In: HAL (Hyper Article on Line) (http://hal.ccsd.cnrs.fr/docs/00/00/25/06/PDF/ICPP2004.pdf, e-Proc. of 12th ICPP

ISBN

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ISSN

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e-ISSN

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Počet stran výsledku

6

Strana od-do

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Název nakladatele

Association Euratom-CEA

Místo vydání

Cadarache

Místo konání akce

Nice, France

Datum konání akce

25. 10. 2004

Typ akce podle státní příslušnosti

EUR - Evropská akce

Kód UT WoS článku

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