Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F60461373%3A22340%2F11%3A43891842" target="_blank" >RIV/60461373:22340/11:43891842 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/60461373:22310/11:43891842

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.measurement.2011.08.023" target="_blank" >http://dx.doi.org/10.1016/j.measurement.2011.08.023</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.measurement.2011.08.023" target="_blank" >10.1016/j.measurement.2011.08.023</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method

Popis výsledku v původním jazyce

The paper is devoted to the methodology of measurement of resistivity of thin films using van der Pauw (VDP) technique - in particular to the consequences of typical "defects" that can appear in the samples. To a certain extent, it can be actually deduced from the measurement whether the defect is fatal, and the sample has to be excluded from the experimental results (incorrigible defect), or whether the error can be subsequently corrected numerically (corrigible defect). This is important especially for ultrathin films close to the limit of their connectivity, where the consequences of these defects can be easily mistaken for actual anomalous behaviour. Therefore, we decided to simulate the consequences of such defects experimentally.

Název v anglickém jazyce

Study of quantitative influence of sample defects on measurements of resistivity of thin films using van der Pauw method

Popis výsledku anglicky

The paper is devoted to the methodology of measurement of resistivity of thin films using van der Pauw (VDP) technique - in particular to the consequences of typical "defects" that can appear in the samples. To a certain extent, it can be actually deduced from the measurement whether the defect is fatal, and the sample has to be excluded from the experimental results (incorrigible defect), or whether the error can be subsequently corrected numerically (corrigible defect). This is important especially for ultrathin films close to the limit of their connectivity, where the consequences of these defects can be easily mistaken for actual anomalous behaviour. Therefore, we decided to simulate the consequences of such defects experimentally.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

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Projekt

—

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement

ISSN

0263-2241

e-ISSN

—

Svazek periodika

44

Číslo periodika v rámci svazku

10

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

12

Strana od-do

1968-1979

Kód UT WoS článku

000297084400019

EID výsledku v databázi Scopus

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