Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389005%3A_____%2F01%3A49010049" target="_blank" >RIV/61389005:_____/01:49010049 - isvavai.cz</a>

Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions.

Popis výsledku v původním jazyce

50 mum thick polyimide (Kapton, PI) foils were irradiated with 100 keV He+, Ne+, Ar+ and Kr+ ions to fluences from 1 x 10(12) to 1 x 10(16) cm(-2), and the structural and compositional changes in the polymer surface layer, degraded by the ion bombardment, were studied by RES and ERDA techniques. The sheet resistance at room temperature was also measured. Significant hydrogen and oxygen depletion is observed for the ion fluences above 1 x 10(14) cm(-2) in the PIsurface layer, the thickness of which is anincreasing function of the ion projected range. Measured H and O depth profiles are structureless with the concentration monotonically increasing from the sample surface to the sample bulk where it achieves the value typical for pristine PI. The sheet resistance remains unchanged up to the fluence of 10(14)cm(-2) and then it declines rapidly by several orders of magnitude, the decline being more pronounced for heavier ions.

Název v anglickém jazyce

Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions.

Popis výsledku anglicky

50 mum thick polyimide (Kapton, PI) foils were irradiated with 100 keV He+, Ne+, Ar+ and Kr+ ions to fluences from 1 x 10(12) to 1 x 10(16) cm(-2), and the structural and compositional changes in the polymer surface layer, degraded by the ion bombardment, were studied by RES and ERDA techniques. The sheet resistance at room temperature was also measured. Significant hydrogen and oxygen depletion is observed for the ion fluences above 1 x 10(14) cm(-2) in the PIsurface layer, the thickness of which is anincreasing function of the ion projected range. Measured H and O depth profiles are structureless with the concentration monotonically increasing from the sample surface to the sample bulk where it achieves the value typical for pristine PI. The sheet resistance remains unchanged up to the fluence of 10(14)cm(-2) and then it declines rapidly by several orders of magnitude, the decline being more pronounced for heavier ions.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BG - Jaderná, atomová a molekulová fyzika, urychlovače

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2001

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Nuclear Instruments and Methods in Physics Research. B - Beam Interactions with Materials and Atoms

ISSN

0168-583X

e-ISSN

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Svazek periodika

175

Číslo periodika v rámci svazku

N/A

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

5

Strana od-do

437-441

Kód UT WoS článku

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EID výsledku v databázi Scopus

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