Optical properties of Fe2O3 deposited by IBAD and its usage in interference filters

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F61389021%3A_____%2F15%3A00444506" target="_blank" >RIV/61389021:_____/15:00444506 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.2176920" target="_blank" >http://dx.doi.org/10.1117/12.2176920</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.2176920" target="_blank" >10.1117/12.2176920</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Optical properties of Fe2O3 deposited by IBAD and its usage in interference filters

Popis výsledku v původním jazyce

This paper deals with thin films of Hematite (Fe2O3) deposited by ion beam assisted deposition (IBAD).It describes variation of optical properties with deposition parameters, especially oxygen flow and deposition rate. Optimal deposition parameters for Fe2O3 thin film were identified with criterion of the highest possible refractive index and lowest absorption.Film properties were measured and modelled by spectroscopic ellipsometry. Design of Fabry-Perot interference filter was used as a case study to compare properties of a Fe2O3 and TiO2 as a high refractive index materials. The first design uses combination of TiO2 and SiO2 layers, which is considered as a standard solution.The second design consists of Fe2O3 and YF3 layers. Comparison of these twodesigns shows that the design with SiO2 and Fe2O3 has considerably lower layer count.Due to the fact that Fe2O3 has significant absorption in the visible spectra its use is limited to red and infrared wavelengths.The paper describes

Název v anglickém jazyce

Optical properties of Fe2O3 deposited by IBAD and its usage in interference filters

Popis výsledku anglicky

This paper deals with thin films of Hematite (Fe2O3) deposited by ion beam assisted deposition (IBAD).It describes variation of optical properties with deposition parameters, especially oxygen flow and deposition rate. Optimal deposition parameters for Fe2O3 thin film were identified with criterion of the highest possible refractive index and lowest absorption.Film properties were measured and modelled by spectroscopic ellipsometry. Design of Fabry-Perot interference filter was used as a case study to compare properties of a Fe2O3 and TiO2 as a high refractive index materials. The first design uses combination of TiO2 and SiO2 layers, which is considered as a standard solution.The second design consists of Fe2O3 and YF3 layers. Comparison of these twodesigns shows that the design with SiO2 and Fe2O3 has considerably lower layer count.Due to the fact that Fe2O3 has significant absorption in the visible spectra its use is limited to red and infrared wavelengths.The paper describes

Druh

D - Stať ve sborníku

CEP obor

JJ - Ostatní materiály

OECD FORD obor

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Projekt

<a href="/cs/project/LO1206" target="_blank" >LO1206: Moderní optické systémy a technologie</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of SPIE Vol. 9442: Optics and Measurement Conference 2014

ISBN

978-1-62841-557-5

ISSN

0277-786X

e-ISSN

—

Počet stran výsledku

5

Strana od-do

944207-944207

Název nakladatele

SPIE-INT SOC OPTICAL ENGINEERING

Místo vydání

Bellingham

Místo konání akce

Liberec

Datum konání akce

7. 10. 2014

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000349403500006