Local anodic oxidation of nanostructures

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Local anodic oxidation of nanostructures

Popis výsledku v původním jazyce

Atomic force microscope is a device suitable for the creation of lithography using multiple kinds of techniques. AFM Anodic Oxidation Lithography is a kind of the AFM Voltage Lithography. With the use of the Voltage Lithography not only geometrical properties of the surface but also the local electro physical properties of the sample surface can be changed. Value of applied voltage influences results of voltage lithography as much as conductivity of the sample and surface quality. It turned out that theoxidation lithography (LAO) requires the voltage supply, as well as the sharpness of the tip and the ambient humidity. Local anodic oxidation lithography is a method that can change the surface of (semi)conductive sample in routine laboratory conditions. Increased humidity is the only requirement in the near vicinity of the sample. Mainly the tip sharpness but also many other parameters indicate the size of oxidation trace. Height and smooth of the track is inversely proportional to the

Název v anglickém jazyce

Local anodic oxidation of nanostructures

Popis výsledku anglicky

Atomic force microscope is a device suitable for the creation of lithography using multiple kinds of techniques. AFM Anodic Oxidation Lithography is a kind of the AFM Voltage Lithography. With the use of the Voltage Lithography not only geometrical properties of the surface but also the local electro physical properties of the sample surface can be changed. Value of applied voltage influences results of voltage lithography as much as conductivity of the sample and surface quality. It turned out that theoxidation lithography (LAO) requires the voltage supply, as well as the sharpness of the tip and the ambient humidity. Local anodic oxidation lithography is a method that can change the surface of (semi)conductive sample in routine laboratory conditions. Increased humidity is the only requirement in the near vicinity of the sample. Mainly the tip sharpness but also many other parameters indicate the size of oxidation trace. Height and smooth of the track is inversely proportional to the

Druh

D - Stať ve sborníku

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

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Návaznosti

S - Specificky vyzkum na vysokych skolach

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

NANOCON 2011 - Conference Proceedings

ISBN

978-80-87294-27-7

ISSN

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e-ISSN

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Počet stran výsledku

3

Strana od-do

384-386

Název nakladatele

Tanger s.r.o.

Místo vydání

Ostrava

Místo konání akce

Brno

Datum konání akce

21. 9. 2011

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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