Characterization of rainbowlike hanze on (111) Si wafers.

Kód výsledku v IS VaVaI
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Jazyk výsledku
angličtina
Název v původním jazyce
Characterization of rainbowlike hanze on (111) Si wafers.
Popis výsledku v původním jazyce
Silicon single crystals used in microelectronic industry are mostly grownin crystalline orientations (111) or (100). These crystals are processed to polished wafers by several technological steps. The first one is their cutting. The crystals in crystalline orientation (111) are usually cut with off-orientation up to 4 degrees of (111) crystalline plane. Only wafers for some special applications are cut with zero off-orientation. A specialoptical feature of polished surface of (111) silicon wafers cut with zerooff-orientation is presentsed in this paper.
Název v anglickém jazyce
Characterization of rainbowlike hanze on (111) Si wafers.
Popis výsledku anglicky
Silicon single crystals used in microelectronic industry are mostly grownin crystalline orientations (111) or (100). These crystals are processed to polished wafers by several technological steps. The first one is their cutting. The crystals in crystalline orientation (111) are usually cut with off-orientation up to 4 degrees of (111) crystalline plane. Only wafers for some special applications are cut with zero off-orientation. A specialoptical feature of polished surface of (111) silicon wafers cut with zerooff-orientation is presentsed in this paper.

Rok uplatnění
2002
Kód důvěrnosti údajů
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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