Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope.

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F03%3A12030052" target="_blank" >RIV/68081731:_____/03:12030052 - isvavai.cz</a>

Výsledek na webu

—

DOI - Digital Object Identifier

—

Jazyk výsledku

angličtina

Název v původním jazyce

Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope.

Popis výsledku v původním jazyce

This paper concerns the problems connected with the observation of a nonconductive specimen in a scanning electron microscope (SEM) when incident electrons create a surface change and a corresponding electric field. The special configuration of the cathode lens enables one to control the landing energy of primary electrons via the specimen bias. In the cathode lens, the accelerating electric field at the surface of the specimen combines itself with that of the surface in influencing the trajectories ofthe signal electrons and hence the detected signal level and the possible recapturing of slow secondaries. Recaptured electrons reduce the ultimate positive surface potential, which arises when working below the higher critical energy of electron impact.Computer simulations of electron trajectories were performed for the typical cathode lens configuration and for a model specimen characterized by emission yields similar to those for glass. The simulations brought an extensive set of dat

Název v anglickém jazyce

Specimen Charging and Detection of Signal from Non-conductors in a Cathode Lens-Equipped Scanning Electron Microscope.

Popis výsledku anglicky

This paper concerns the problems connected with the observation of a nonconductive specimen in a scanning electron microscope (SEM) when incident electrons create a surface change and a corresponding electric field. The special configuration of the cathode lens enables one to control the landing energy of primary electrons via the specimen bias. In the cathode lens, the accelerating electric field at the surface of the specimen combines itself with that of the surface in influencing the trajectories ofthe signal electrons and hence the detected signal level and the possible recapturing of slow secondaries. Recaptured electrons reduce the ultimate positive surface potential, which arises when working below the higher critical energy of electron impact.Computer simulations of electron trajectories were performed for the typical cathode lens configuration and for a model specimen characterized by emission yields similar to those for glass. The simulations brought an extensive set of dat

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

—

Projekt

<a href="/cs/project/IBS2065017" target="_blank" >IBS2065017: Rastrovací elektronová mikroskopie nevodivých vzorků</a><br>

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2003

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Scanning

ISSN

0161-0457

e-ISSN

—

Svazek periodika

25

Číslo periodika v rámci svazku

3

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

7

Strana od-do

150-156

Kód UT WoS článku

—

EID výsledku v databázi Scopus

—