Metodika mikroskopie pomalými elektrony s katodovou čočkou

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Methodology of slow electron microscopy with cathode lens

Popis výsledku v původním jazyce

Conventional scanning electron microscope with the primary electron beam of energy 10 keV or more is equipped by the cathode lens with the sample serving as the cathode. In the field of the cathode lens the primary beam, already formed and focused, is retarded to an arbitrarily low energy, and in the same field the emitted electrons are accelerated and collimated toward optical axis. The cathode lens is completed with a detector of the signal beam, situated either above the objective lens or below it, and in the later case combined with anode of the cathode lens. Correcting effect of the cathode lens reduces significantly aberrations of the assembly and enables one to achieve image resolution in units of nanometers for the electron landing energy evenin the range of units of electronvolts.

Název v anglickém jazyce

Methodology of slow electron microscopy with cathode lens

Popis výsledku anglicky

Conventional scanning electron microscope with the primary electron beam of energy 10 keV or more is equipped by the cathode lens with the sample serving as the cathode. In the field of the cathode lens the primary beam, already formed and focused, is retarded to an arbitrarily low energy, and in the same field the emitted electrons are accelerated and collimated toward optical axis. The cathode lens is completed with a detector of the signal beam, situated either above the objective lens or below it, and in the later case combined with anode of the cathode lens. Correcting effect of the cathode lens reduces significantly aberrations of the assembly and enables one to achieve image resolution in units of nanometers for the electron landing energy evenin the range of units of electronvolts.

Druh

X - Nezařazeno

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2005

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů