AFM nanometrology interferometric system with the compensation of angle errors

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F11%3A00367516" target="_blank" >RIV/68081731:_____/11:00367516 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1117/12.889544" target="_blank" >http://dx.doi.org/10.1117/12.889544</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1117/12.889544" target="_blank" >10.1117/12.889544</a>

Jazyk výsledku

angličtina

Název v původním jazyce

AFM nanometrology interferometric system with the compensation of angle errors

Popis výsledku v původním jazyce

The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance.

Název v anglickém jazyce

AFM nanometrology interferometric system with the compensation of angle errors

Popis výsledku anglicky

The contribution is oriented towards measuring in the nanoscale through local probe microscopy techniques, primarily the AFM microscopy. The need to make the AFM microscope a nanometrology tool not only the positioning of the tip has to be based on precise measurements but the traceability of the measuring technique has to be ensured up to the primary standard. This leads to the engagement of laser interferometric measuring methods. We present a improved design of the six-axes dimensional interferometric measurement tool for local probe microscopy stage nanopositioning with the compensation system of angle errors. The setup is powered with the help of a single-frequency frequency-doubled Nd:YAG laser which is stabilized by thermal frequency control locked to a Doppler-broadened absorption line in iodine. The laser stabilization technique is described together with comparison of frequency stability and angle errors compensation system performance.

Druh

D - Stať ve sborníku

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2011

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Optical Measurement Systems for Industrial Inspection VII (Proceedings of SPIE Vol. 8082)

ISBN

978-0-8194-8678-3

ISSN

—

e-ISSN

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Počet stran výsledku

6

Strana od-do

"80823U:1"-"6"

Název nakladatele

SPIE

Místo vydání

Bellingham

Místo konání akce

Munich

Datum konání akce

23. 5. 2011

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

000295076900133