Analysis Of Gas Flow In The New System Of Apertures In The Secondary Electron Scintillation Detector For ESEM

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00384060" target="_blank" >RIV/68081731:_____/12:00384060 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/00216305:26220/12:PU99285

Výsledek na webu

<a href="http://dx.doi.org/10.1017/S1431927612008173" target="_blank" >http://dx.doi.org/10.1017/S1431927612008173</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1017/S1431927612008173" target="_blank" >10.1017/S1431927612008173</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Analysis Of Gas Flow In The New System Of Apertures In The Secondary Electron Scintillation Detector For ESEM

Popis výsledku v původním jazyce

he scintillation detector of secondary electrons for Environmental scanning electron microscope (ESEM) is designed to be able to detect secondary electrons (SE) with high efficiency at gas pressure range from 0,01 Pa to 1000 Pa in the specimen chamber ofESEM. In the detector, see Fig. 1, the scintillator is placed in a separately pumped chamber, which is separated from the specimen chamber by two pressure-limiting apertures. The apertures reduce the gas flow through the detector and due to the accelerating voltage up to 10 kV on the scintillator prevent electric discharge (the gas pressure in the scintillator chamber must not exceed 5 Pa). The voltage on the apertures (on order of hundreds of volts) creates an electrostatic field, which helps the detected SE to pass towards the scintillator. The size of the aperture holes, their distance, the shape of the space between them as well as the speed of vacuum pump crucially influence the gas flow character and attainable decrease of gas pr

Název v anglickém jazyce

Analysis Of Gas Flow In The New System Of Apertures In The Secondary Electron Scintillation Detector For ESEM

Popis výsledku anglicky

he scintillation detector of secondary electrons for Environmental scanning electron microscope (ESEM) is designed to be able to detect secondary electrons (SE) with high efficiency at gas pressure range from 0,01 Pa to 1000 Pa in the specimen chamber ofESEM. In the detector, see Fig. 1, the scintillator is placed in a separately pumped chamber, which is separated from the specimen chamber by two pressure-limiting apertures. The apertures reduce the gas flow through the detector and due to the accelerating voltage up to 10 kV on the scintillator prevent electric discharge (the gas pressure in the scintillator chamber must not exceed 5 Pa). The voltage on the apertures (on order of hundreds of volts) creates an electrostatic field, which helps the detected SE to pass towards the scintillator. The size of the aperture holes, their distance, the shape of the space between them as well as the speed of vacuum pump crucially influence the gas flow character and attainable decrease of gas pr

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JA - Elektronika a optoelektronika, elektrotechnika

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Microscopy and Microanalysis

ISSN

1431-9276

e-ISSN

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Svazek periodika

18

Číslo periodika v rámci svazku

Suppl. 2

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

2

Strana od-do

1264-1265

Kód UT WoS článku

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EID výsledku v databázi Scopus

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