Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F15%3A00449486" target="_blank" >RIV/68081731:_____/15:00449486 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1515/msr-2015-0036" target="_blank" >http://dx.doi.org/10.1515/msr-2015-0036</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1515/msr-2015-0036" target="_blank" >10.1515/msr-2015-0036</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Popis výsledku v původním jazyce

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.

Název v anglickém jazyce

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Popis výsledku anglicky

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2015

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Measurement Science Review

ISSN

1335-8871

e-ISSN

—

Svazek periodika

15

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

SK - Slovenská republika

Počet stran výsledku

5

Strana od-do

263-267

Kód UT WoS článku

000368270800006

EID výsledku v databázi Scopus

2-s2.0-84946753292