Measurements of current density distribution in shaped e-beam writers

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00454665" target="_blank" >RIV/68081731:_____/16:00454665 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.mee.2015.09.013" target="_blank" >http://dx.doi.org/10.1016/j.mee.2015.09.013</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.mee.2015.09.013" target="_blank" >10.1016/j.mee.2015.09.013</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Measurements of current density distribution in shaped e-beam writers

Popis výsledku v původním jazyce

In this paper, we present four measurement methods for the two-dimensional mapping of the current density distribution in variable-shaped e-beam writers. All the methods use only the native equipment of the e-beam writer which provides the advantage of relatively easy implementation. The first and second measurement methods are based on the knife-edge technique in which the e-beam is scanned in two directions across a Faraday cup opening and across shaping shutters of the forming system, respectively. In the thirdmethod, a phosphor screen is irradiated by a magnified e-beam spot and the current density distribution is represented by the luminescence image on the screen. The fourth method uses electron sensitive resist which is exposed by the e-beam. The developed resist is observed under a microscope and the current density distribution is judged fromthe resist profile. All the methods are demonstrated in an example, compared, and their spatial resolution and accuracy evaluated.

Název v anglickém jazyce

Measurements of current density distribution in shaped e-beam writers

Popis výsledku anglicky

In this paper, we present four measurement methods for the two-dimensional mapping of the current density distribution in variable-shaped e-beam writers. All the methods use only the native equipment of the e-beam writer which provides the advantage of relatively easy implementation. The first and second measurement methods are based on the knife-edge technique in which the e-beam is scanned in two directions across a Faraday cup opening and across shaping shutters of the forming system, respectively. In the thirdmethod, a phosphor screen is irradiated by a magnified e-beam spot and the current density distribution is represented by the luminescence image on the screen. The fourth method uses electron sensitive resist which is exposed by the e-beam. The developed resist is observed under a microscope and the current density distribution is judged fromthe resist profile. All the methods are demonstrated in an example, compared, and their spatial resolution and accuracy evaluated.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

JB - Senzory, čidla, měření a regulace

OECD FORD obor

—

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2016

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Microelectronic Engineering

ISSN

0167-9317

e-ISSN

—

Svazek periodika

149

Číslo periodika v rámci svazku

JAN 5

Stát vydavatele periodika

NL - Nizozemsko

Počet stran výsledku

8

Strana od-do

117-124

Kód UT WoS článku

000367420200021

EID výsledku v databázi Scopus

2-s2.0-84944145588