Comparison of photon transport efficiency in simple scintillation electron detector configurations for scanning electron microscope

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F22%3A00552072" target="_blank" >RIV/68081731:_____/22:00552072 - isvavai.cz</a>

Výsledek na webu

<a href="https://analyticalsciencejournals.onlinelibrary.wiley.com/doi/10.1002/jemt.24048" target="_blank" >https://analyticalsciencejournals.onlinelibrary.wiley.com/doi/10.1002/jemt.24048</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/jemt.24048" target="_blank" >10.1002/jemt.24048</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Comparison of photon transport efficiency in simple scintillation electron detector configurations for scanning electron microscope

Popis výsledku v původním jazyce

The purpose of this paper is to find some general rules for the design of robust scintillation electron detectors for a scanning electron microscope (SEM) that possesses an efficient light-guiding (LG) system. The paper offers some general instructions on how to avoid the improper design of highly inefficient LG configurations of the detectors. Attention was paid to the relevant optical properties of the scintillator, light guide, and other components used in the LG part of the scintillation detector. Utilizing the optical properties of the detector components, 3D Monte Carlo (MC) simulations of photon transport efficiency in the simple scintillation detector configurations were performed using the computer application called SCIUNI to assess shapes and dimensions of the LG part of the detector. The results of the simulation of both base-guided signal (BGS) configurations for SE detection and edge-guided signal (EGS) configurations for BSE detection are presented. It is demonstrated that the BGS configuration with a matted disc scintillator exit side connected to the cylindrical light guide without optical cement is almost always a sufficiently efficient system with a mean LG efficiency of about 20%. It is simulated that poorly designed EGS strip configurations have an extremely low mean LG efficiency of only 0.01%, which can significantly reduce detector performance. On the other hand, no simple nonoptimized EGS configuration with a light guide widening to a circular or square profile, with a polished cemented scintillator and with an indispensable hole in it has a mean LG efficiency lower than 6.5%.

Název v anglickém jazyce

Comparison of photon transport efficiency in simple scintillation electron detector configurations for scanning electron microscope

Popis výsledku anglicky

The purpose of this paper is to find some general rules for the design of robust scintillation electron detectors for a scanning electron microscope (SEM) that possesses an efficient light-guiding (LG) system. The paper offers some general instructions on how to avoid the improper design of highly inefficient LG configurations of the detectors. Attention was paid to the relevant optical properties of the scintillator, light guide, and other components used in the LG part of the scintillation detector. Utilizing the optical properties of the detector components, 3D Monte Carlo (MC) simulations of photon transport efficiency in the simple scintillation detector configurations were performed using the computer application called SCIUNI to assess shapes and dimensions of the LG part of the detector. The results of the simulation of both base-guided signal (BGS) configurations for SE detection and edge-guided signal (EGS) configurations for BSE detection are presented. It is demonstrated that the BGS configuration with a matted disc scintillator exit side connected to the cylindrical light guide without optical cement is almost always a sufficiently efficient system with a mean LG efficiency of about 20%. It is simulated that poorly designed EGS strip configurations have an extremely low mean LG efficiency of only 0.01%, which can significantly reduce detector performance. On the other hand, no simple nonoptimized EGS configuration with a light guide widening to a circular or square profile, with a polished cemented scintillator and with an indispensable hole in it has a mean LG efficiency lower than 6.5%.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

20201 - Electrical and electronic engineering

Projekt

<a href="/cs/project/TN01000008" target="_blank" >TN01000008: Centrum elektronové a fotonové optiky</a><br>

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2022

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Microscopy Research and Technique

ISSN

1059-910X

e-ISSN

1097-0029

Svazek periodika

85

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

14

Strana od-do

1870-1883

Kód UT WoS článku

000738349000001

EID výsledku v databázi Scopus

2-s2.0-85122267363