Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F12%3A00387342" target="_blank" >RIV/68378271:_____/12:00387342 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.02.039" target="_blank" >http://dx.doi.org/10.1016/j.surfcoat.2012.02.039</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.surfcoat.2012.02.039" target="_blank" >10.1016/j.surfcoat.2012.02.039</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films

Popis výsledku v původním jazyce

The results of a study of small additions of oxygen and nitrogen on the structure and mechanical properties of nanocrystalline titanium films obtained by magnetron sputtering are presented. The hardness and elastic modulus were determined by nanoindentaion technique. The film composition and structure were investigated by OES, SEM, XRD. Hardness and elastic modulus of the nanocrystalline films with small content of oxygen at (<= 2 at.%) and nitrogen (<= 1 at.%) remained approximately the same as for nanocrystalline films deposited in pure Ar. Significant growth of hardness from similar to 4 to similar to 10 GPa was observed at the increase of oxygen/nitrogen content up to similar to 6 at.%. It was accompanied by reducing grain size from similar to 85 to similar to 20 nm and growth of compressive stress. The obtained results are explained by changing of the film structure and composition.

Název v anglickém jazyce

Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films

Popis výsledku anglicky

The results of a study of small additions of oxygen and nitrogen on the structure and mechanical properties of nanocrystalline titanium films obtained by magnetron sputtering are presented. The hardness and elastic modulus were determined by nanoindentaion technique. The film composition and structure were investigated by OES, SEM, XRD. Hardness and elastic modulus of the nanocrystalline films with small content of oxygen at (<= 2 at.%) and nitrogen (<= 1 at.%) remained approximately the same as for nanocrystalline films deposited in pure Ar. Significant growth of hardness from similar to 4 to similar to 10 GPa was observed at the increase of oxygen/nitrogen content up to similar to 6 at.%. It was accompanied by reducing grain size from similar to 85 to similar to 20 nm and growth of compressive stress. The obtained results are explained by changing of the film structure and composition.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BH - Optika, masery a lasery

OECD FORD obor

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Projekt

—

Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2012

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Surface and Coatings Technology

ISSN

0257-8972

e-ISSN

—

Svazek periodika

206

Číslo periodika v rámci svazku

17

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

6

Strana od-do

3580-3585

Kód UT WoS článku

000303644900003

EID výsledku v databázi Scopus

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