Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F13%3A00421423" target="_blank" >RIV/68378271:_____/13:00421423 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1002/pssb.201300117" target="_blank" >http://dx.doi.org/10.1002/pssb.201300117</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssb.201300117" target="_blank" >10.1002/pssb.201300117</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems

Popis výsledku v původním jazyce

In this work, the diamond nucleation is studied using two different deposition systems: (i) focused microwave plasma (labeled as ?hot plasma) and (ii) pulsed-linear antenna microwave plasma (?cold plasma). For the hot plasma, the in?uence of CH4 concentration in the hydrogen rich gas mixture on the self nucleation is investigated. It is found that higher CH4 concentration leads to increased diamond nucle- ation density, but also the amount of sp2 carbon bonds increases within the deposits. In the cold plasma, we investigate the in?uence of CO2 addition into CH4/H2 and total process pressure. The nucleation density (Nd) typical for non-treated substrates is improved by four orders in cold plasma thanks to increased CH4 and CO2 concentrations. The highest nucleation density in the hot plasma system is still one order lower Moreover, in cold plasma a bimodal distribution function of diamond clusters is observed for low ratios of CO2/H2.

Název v anglickém jazyce

Enhanced spontaneous nucleation of diamond nuclei in hot and cold microwave plasma systems

Popis výsledku anglicky

In this work, the diamond nucleation is studied using two different deposition systems: (i) focused microwave plasma (labeled as ?hot plasma) and (ii) pulsed-linear antenna microwave plasma (?cold plasma). For the hot plasma, the in?uence of CH4 concentration in the hydrogen rich gas mixture on the self nucleation is investigated. It is found that higher CH4 concentration leads to increased diamond nucle- ation density, but also the amount of sp2 carbon bonds increases within the deposits. In the cold plasma, we investigate the in?uence of CO2 addition into CH4/H2 and total process pressure. The nucleation density (Nd) typical for non-treated substrates is improved by four orders in cold plasma thanks to increased CH4 and CO2 concentrations. The highest nucleation density in the hot plasma system is still one order lower Moreover, in cold plasma a bimodal distribution function of diamond clusters is observed for low ratios of CO2/H2.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2013

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica Status Solidi B-Basic Solid State Physics

ISSN

0370-1972

e-ISSN

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Svazek periodika

250

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

DE - Spolková republika Německo

Počet stran výsledku

5

Strana od-do

2753-2758

Kód UT WoS článku

000328325900048

EID výsledku v databázi Scopus

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