Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F14%3A00432636" target="_blank" >RIV/68378271:_____/14:00432636 - isvavai.cz</a>

Výsledek na webu

<a href="http://dx.doi.org/10.1166/asem.2014.1571" target="_blank" >http://dx.doi.org/10.1166/asem.2014.1571</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1166/asem.2014.1571" target="_blank" >10.1166/asem.2014.1571</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry

Popis výsledku v původním jazyce

Diamond films and structures were grown by MWCVD. We show that increasing of CH4 concentration in the gas mixture up to 8% results almost in a linear increasing of growth rate (up to 900 nm/h). Unfortunately, diamond film quality decreases due to the dominance of sp2 carbon phases, as confirmed by Raman measurements. Furthermore, increasing of CH4 concentration also enhances spontaneous nucleation. Addition of N2 and CO2 into CH4/H2 gas mixture also enhances the growth rate. Nitrogen shifts the film morphology from micro- to nanocrystalline. For enough high methane concentration (>5% CH4), increasing of nitrogen further shifts the diamond growth in formation of nanowire like structures. In opposite to the nitrogen addition, adding CO2 to the gas mixture improved the film quality. In this case, a higher methane concentration can be used to increase the growth rate while keeping good enough film quality.

Název v anglickém jazyce

Growth rate enhancement and morphology engineering of diamond films by adding CO2 or N2 in hydrogen rich gas chemistry

Popis výsledku anglicky

Diamond films and structures were grown by MWCVD. We show that increasing of CH4 concentration in the gas mixture up to 8% results almost in a linear increasing of growth rate (up to 900 nm/h). Unfortunately, diamond film quality decreases due to the dominance of sp2 carbon phases, as confirmed by Raman measurements. Furthermore, increasing of CH4 concentration also enhances spontaneous nucleation. Addition of N2 and CO2 into CH4/H2 gas mixture also enhances the growth rate. Nitrogen shifts the film morphology from micro- to nanocrystalline. For enough high methane concentration (>5% CH4), increasing of nitrogen further shifts the diamond growth in formation of nanowire like structures. In opposite to the nitrogen addition, adding CO2 to the gas mixture improved the film quality. In this case, a higher methane concentration can be used to increase the growth rate while keeping good enough film quality.

Druh

J_x - Nezařazeno - Článek v odborném periodiku (Jimp, Jsc a Jost)

CEP obor

BM - Fyzika pevných látek a magnetismus

OECD FORD obor

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Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2014

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Advanced Science, Engineering and Medicine

ISSN

2164-6627

e-ISSN

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Svazek periodika

6

Číslo periodika v rámci svazku

7

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

7

Strana od-do

749-755

Kód UT WoS článku

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EID výsledku v databázi Scopus

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