Characteristics of zirconium and niobium contacts on boron-doped diamond

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F18%3A00490077" target="_blank" >RIV/68378271:_____/18:00490077 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21460/18:00329697

Výsledek na webu

<a href="http://dx.doi.org/10.1016/j.diamond.2018.02.009" target="_blank" >http://dx.doi.org/10.1016/j.diamond.2018.02.009</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1016/j.diamond.2018.02.009" target="_blank" >10.1016/j.diamond.2018.02.009</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Characteristics of zirconium and niobium contacts on boron-doped diamond

Popis výsledku v původním jazyce

Formation of ohmic contacts on boron-doped diamond using zirconium and niobium has been studied in comparison to the commonly used titanium or tantalum contacts. Metal contacts were fabricated using standard micro-fabrication technologies on epitaxial layers with different boron concentrations. Room temperature specific contact resistance was determined using the circular Transmission Line Model after annealing at various temperatures. The specific contact resistance varies considerably with boron concentration and annealing temperature. Zirconium and niobium form ohmic contacts on highly boron-doped diamond after high-temperature annealing with a specific contact resistance comparable to that of titanium and tantalum contacts. Furthermore, we observed zirconium contacts showed better thermal stability upon high-temperature annealing compared to titanium and other metal contacts. These results emphasize the potential of zirconium for the formation of ohmic contacts on boron-doped diamond.

Název v anglickém jazyce

Characteristics of zirconium and niobium contacts on boron-doped diamond

Popis výsledku anglicky

Formation of ohmic contacts on boron-doped diamond using zirconium and niobium has been studied in comparison to the commonly used titanium or tantalum contacts. Metal contacts were fabricated using standard micro-fabrication technologies on epitaxial layers with different boron concentrations. Room temperature specific contact resistance was determined using the circular Transmission Line Model after annealing at various temperatures. The specific contact resistance varies considerably with boron concentration and annealing temperature. Zirconium and niobium form ohmic contacts on highly boron-doped diamond after high-temperature annealing with a specific contact resistance comparable to that of titanium and tantalum contacts. Furthermore, we observed zirconium contacts showed better thermal stability upon high-temperature annealing compared to titanium and other metal contacts. These results emphasize the potential of zirconium for the formation of ohmic contacts on boron-doped diamond.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2018

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Diamond and Related Materials

ISSN

0925-9635

e-ISSN

—

Svazek periodika

83

Číslo periodika v rámci svazku

Mar

Stát vydavatele periodika

CH - Švýcarská konfederace

Počet stran výsledku

6

Strana od-do

184-189

Kód UT WoS článku

000430767200025

EID výsledku v databázi Scopus

2-s2.0-85042370453