Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F21%3A00551091" target="_blank" >RIV/68378271:_____/21:00551091 - isvavai.cz</a>

Výsledek na webu

<a href="https://doi.org/10.1021/acsaelm.1c01105" target="_blank" >https://doi.org/10.1021/acsaelm.1c01105</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1021/acsaelm.1c01105" target="_blank" >10.1021/acsaelm.1c01105</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric

Popis výsledku v původním jazyce

We investigated dielectric and structural properties of ~10 nm thin films consisting of stacked 1 nm thin ferroelectric (FE) Hf1−xZrxO2 (HZO(x)) and antiferroelectric (AFE) ZrO2 layers. At x < 0.5, the measurements of polarization vs electric field revealed pure FE hysteresis loops, whereas at x > 0.5, pinched hysteresis loops with some remnant polarization were observed, which indicate a coexistence of FE and AFE orderings. In this way, we demonstrate that the coexistence of FE and AFE orderings can be controlled by adjusting the composition of HZO(x) layers in the HZO(x)/ZrO2 nanolaminate films. At x = 0.5, the dielectric constant is ~ 60 in nanolaminate films, which is much higher than that of the conventional HZO(x) solid solution thin films. Structural investigations confirm a coexistence of polar orthorhombic and nonpolar tetragonal structures, which is consistent with the observed polarization hysteresis loops.

Název v anglickém jazyce

Hf1−xZrxO2/ZrO2 nanolaminate thin films as a high‑κ dielectric

Popis výsledku anglicky

We investigated dielectric and structural properties of ~10 nm thin films consisting of stacked 1 nm thin ferroelectric (FE) Hf1−xZrxO2 (HZO(x)) and antiferroelectric (AFE) ZrO2 layers. At x < 0.5, the measurements of polarization vs electric field revealed pure FE hysteresis loops, whereas at x > 0.5, pinched hysteresis loops with some remnant polarization were observed, which indicate a coexistence of FE and AFE orderings. In this way, we demonstrate that the coexistence of FE and AFE orderings can be controlled by adjusting the composition of HZO(x) layers in the HZO(x)/ZrO2 nanolaminate films. At x = 0.5, the dielectric constant is ~ 60 in nanolaminate films, which is much higher than that of the conventional HZO(x) solid solution thin films. Structural investigations confirm a coexistence of polar orthorhombic and nonpolar tetragonal structures, which is consistent with the observed polarization hysteresis loops.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Rok uplatnění

2021

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

ACS Applied Electronic Materials

ISSN

2637-6113

e-ISSN

2637-6113

Svazek periodika

3

Číslo periodika v rámci svazku

12

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

9

Strana od-do

5632-5640

Kód UT WoS článku

000731616400001

EID výsledku v databázi Scopus

2-s2.0-85121727624