Coating of self-sensing atomic force microscopy cantilevers with Boron-doped nanocrystalline diamond at low temperatures

Kód výsledku v IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F25%3A00602379" target="_blank" >RIV/68378271:_____/25:00602379 - isvavai.cz</a>

Nalezeny alternativní kódy

RIV/68407700:21230/25:00377492

Výsledek na webu

<a href="https://hdl.handle.net/11104/0359633" target="_blank" >https://hdl.handle.net/11104/0359633</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1002/pssa.202400553" target="_blank" >10.1002/pssa.202400553</a>

Jazyk výsledku

angličtina

Název v původním jazyce

Coating of self-sensing atomic force microscopy cantilevers with Boron-doped nanocrystalline diamond at low temperatures

Popis výsledku v původním jazyce

Doped diamond has found a commercial use for achieving durable and reproducible electrical measurements in atomic force microscopy (AFM). Yet so far it has not been used on self-sensing AFM probes due to thermally and mechanically sensitive integrated detection circuits. Herein, conventional microwave plasma chemical vapor deposition (CVD) is employed while taking advantage of thermal conductivity along the silicon AFM cantilever probe for growing high-quality B-doped nanocrystalline diamond film on the probe apex that is selectively seeded by dip coating in nanodiamond solution. By investigating various CVD process parameters, it is shown that the detection circuit remains functional up to 400 °C for 2 h deposition or up to 8 h at 300 °C. Scanning electron microscopy and Raman spectroscopy corroborate quality of the diamond coating and doping. The self-sensing probes are successfully tested in conductive AFM (C-AFM) regime and surface spreading resistance regime, showing linear response in current–voltage spectroscopy and capability of conductivity mapping on metals and semiconductor devices. In the results, prospects for stable C-AFM measurements when conventional optical detection is not suitable, such as on photosensitive materials or in probe-electron microscopy, are opened.

Název v anglickém jazyce

Coating of self-sensing atomic force microscopy cantilevers with Boron-doped nanocrystalline diamond at low temperatures

Popis výsledku anglicky

Doped diamond has found a commercial use for achieving durable and reproducible electrical measurements in atomic force microscopy (AFM). Yet so far it has not been used on self-sensing AFM probes due to thermally and mechanically sensitive integrated detection circuits. Herein, conventional microwave plasma chemical vapor deposition (CVD) is employed while taking advantage of thermal conductivity along the silicon AFM cantilever probe for growing high-quality B-doped nanocrystalline diamond film on the probe apex that is selectively seeded by dip coating in nanodiamond solution. By investigating various CVD process parameters, it is shown that the detection circuit remains functional up to 400 °C for 2 h deposition or up to 8 h at 300 °C. Scanning electron microscopy and Raman spectroscopy corroborate quality of the diamond coating and doping. The self-sensing probes are successfully tested in conductive AFM (C-AFM) regime and surface spreading resistance regime, showing linear response in current–voltage spectroscopy and capability of conductivity mapping on metals and semiconductor devices. In the results, prospects for stable C-AFM measurements when conventional optical detection is not suitable, such as on photosensitive materials or in probe-electron microscopy, are opened.

Druh

J_imp - Článek v periodiku v databázi Web of Science

CEP obor

—

OECD FORD obor

10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Projekt

Výsledek vznikl pri realizaci vícero projektů. Více informací v záložce Projekty.

Návaznosti

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Rok uplatnění

2025

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název periodika

Physica Status Solidi A

ISSN

1862-6300

e-ISSN

1862-6319

Svazek periodika

222

Číslo periodika v rámci svazku

5

Stát vydavatele periodika

US - Spojené státy americké

Počet stran výsledku

7

Strana od-do

2400553

Kód UT WoS článku

001324079100001

EID výsledku v databázi Scopus

2-s2.0-86000428410