Thin Films on the Basis of Chromium and Their Selected Properties

Kód výsledku v IS VaVaI

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Výsledek na webu

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DOI - Digital Object Identifier

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Jazyk výsledku

angličtina

Název v původním jazyce

Thin Films on the Basis of Chromium and Their Selected Properties

Popis výsledku v původním jazyce

From chromium based layers there were selected chromium oxide and chromium nitride layers. Metal organic chemical vapour deposition methods of layer preparation were used. The oxide layers were prepared from acetylacetonate of chromium. The nitride layers were prepared from the mixture of bis(benzene)chromium and ammonia. The temperature of deposition was carried out in the temperature range 350-6500C. The oxide layers prepared at the temperatures below 4500C were amorphous and the layers prepared at the temperature 5500C and above were generally polycrystalline. The hardness of the deposited chromium oxide layers on silicon substrates was 18-25 GPa. The hardness of the deposited chromium nitride layers on silicon substrates was 15-20GPa.

Název v anglickém jazyce

Thin Films on the Basis of Chromium and Their Selected Properties

Popis výsledku anglicky

From chromium based layers there were selected chromium oxide and chromium nitride layers. Metal organic chemical vapour deposition methods of layer preparation were used. The oxide layers were prepared from acetylacetonate of chromium. The nitride layers were prepared from the mixture of bis(benzene)chromium and ammonia. The temperature of deposition was carried out in the temperature range 350-6500C. The oxide layers prepared at the temperatures below 4500C were amorphous and the layers prepared at the temperature 5500C and above were generally polycrystalline. The hardness of the deposited chromium oxide layers on silicon substrates was 18-25 GPa. The hardness of the deposited chromium nitride layers on silicon substrates was 15-20GPa.

Druh

D - Stať ve sborníku

CEP obor

JG - Hutnictví, kovové materiály

OECD FORD obor

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Projekt

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Návaznosti

Z - Vyzkumny zamer (s odkazem do CEZ)

Rok uplatnění

2004

Kód důvěrnosti údajů

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Název statě ve sborníku

Proceedings of the 11th Nordic Symposium on Tribology NORDTRIB 2004

ISBN

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ISSN

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e-ISSN

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Počet stran výsledku

7

Strana od-do

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Název nakladatele

Norwegian University of Science and Technology

Místo vydání

Trondheim

Místo konání akce

Tromso - Harstad

Datum konání akce

1. 6. 2004

Typ akce podle státní příslušnosti

WRD - Celosvětová akce

Kód UT WoS článku

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